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New and versatile minature microwave plasma source
(Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in BratislavaBratislava : ociety for Plasma Research and Applications, 2019)
Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the ...
Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source
(IEEE, 2019)
Miniature Microwave Inductively Coupled Plasma (MMWICP) source is a novel and versatile non-thermal plasma source, which profit of high electron density and high power efficiency. In its compact version a single MMWICP ...