New and versatile minature microwave plasma source
Authors
Stefanović, Ilija
Bibinov, Nikita
Porteanu, Horia-Eugen

Klute, Michael

Brinkmann, Ralf Peter

Awakowicz, Peter
Conference object (Published version)
Metadata
Show full item recordAbstract
Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.
Keywords:
Miniature Microwave Inductively Coupled Plasma source / Optical Emission Spectroscopy (OES)Source:
Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019, 2019Publisher:
- Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava
- Bratislava : ociety for Plasma Research and Applications
Institution/Community
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - CONF AU - Stefanović, Ilija AU - Bibinov, Nikita AU - Porteanu, Horia-Eugen AU - Klute, Michael AU - Brinkmann, Ralf Peter AU - Awakowicz, Peter PY - 2019 UR - https://dais.sanu.ac.rs/123456789/6996 AB - Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES. PB - Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava PB - Bratislava : ociety for Plasma Research and Applications C3 - Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019 T1 - New and versatile minature microwave plasma source UR - https://hdl.handle.net/21.15107/rcub_dais_6996 ER -
@conference{ author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf Peter and Awakowicz, Peter", year = "2019", abstract = "Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.", publisher = "Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Bratislava : ociety for Plasma Research and Applications", journal = "Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019", title = "New and versatile minature microwave plasma source", url = "https://hdl.handle.net/21.15107/rcub_dais_6996" }
Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R. P.,& Awakowicz, P.. (2019). New and versatile minature microwave plasma source. in Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019 Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava.. https://hdl.handle.net/21.15107/rcub_dais_6996
Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann RP, Awakowicz P. New and versatile minature microwave plasma source. in Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019. 2019;. https://hdl.handle.net/21.15107/rcub_dais_6996 .
Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf Peter, Awakowicz, Peter, "New and versatile minature microwave plasma source" in Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019 (2019), https://hdl.handle.net/21.15107/rcub_dais_6996 .