Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.
Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019, 2019
Publisher:
Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava
Bratislava : ociety for Plasma Research and Applications
TY - CONF
AU - Stefanović, Ilija
AU - Bibinov, Nikita
AU - Porteanu, Horia-Eugen
AU - Klute, Michael
AU - Brinkmann, Ralf Peter
AU - Awakowicz, Peter
PY - 2019
UR - http://dais.sanu.ac.rs/123456789/6996
AB - Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.
PB - Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava
PB - Bratislava : ociety for Plasma Research and Applications
C3 - Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019
T1 - New and versatile minature microwave plasma source
ER -
@conference{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf Peter and Awakowicz, Peter",
year = "2019",
url = "http://dais.sanu.ac.rs/123456789/6996",
abstract = "Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.",
publisher = "Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Bratislava : ociety for Plasma Research and Applications",
journal = "Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019",
title = "New and versatile minature microwave plasma source"
}
Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann RP, Awakowicz P. New and versatile minature microwave plasma source. Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019. 2019;
Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R. P.,& Awakowicz, P. (2019). New and versatile minature microwave plasma source.
Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava., null.
