Fluctuations of the number of adsorbed molecules due to adsorption-desorption processes coupled with mass transfer and surface diffusion in bio/chemical MEMS sensors

Abstract

A comprehensive theoretical model of the fluctuations of the number of adsorbed molecules in MEMS bio/chemical sensors is presented for the first time; the model takes into account the processes of mass transfer, adsorption and desorption, and surface diffusion of adsorbed molecules. The numerical calculations performed using the derived theory show that the influence of surface diffusion on the fluctuations spectrum is significant and that it also depends on the species of adsorbed molecules.

Poster presented at the 39th International Conference on Micro and Nano Engineering MNE 2013, 16-19 September 2013, London, UK