TY  - JOUR
AU  - Popović, M.
AU  - Novaković, M.
AU  - Pjević, Dejan J.
AU  - Vaňa, Dušan
AU  - Jugović, Dragana
AU  - Tošić, D.
AU  - Noga, Pavol
PY  - 2024
UR  - https://dais.sanu.ac.rs/123456789/16162
AB  - In the present paper, the effects of metal ion implantation on the structural and optical properties of TiN thin films have been investigated. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5 × 1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in the form of a fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers, the cubic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. These changes were correlated with the depth distribution of Au, Ag and Cu ions and assigned to implantation-induced damage that was larger when higher ion energies were used. High-resolution XPS spectra of the surface of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases and this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For the as deposited film we found an energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, the existence of additional energy levels, at photon energies below 2.9 eV was observed. Besides, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag implanted films compared to Cu implantations was ascribed to larger structural defects and the formation of less favorable electronic states.
PB  - Elsevier
T2  - Journal of Alloys and Compounds
T1  - Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: The effects of surface oxidation and ion-induced defects
SP  - 173046
VL  - 976
DO  - 10.1016/j.jallcom.2023.173046
UR  - https://hdl.handle.net/21.15107/rcub_dais_16162
ER  - 

@article{
author = "Popović, M. and Novaković, M. and Pjević, Dejan J. and Vaňa, Dušan and Jugović, Dragana and Tošić, D. and Noga, Pavol",
year = "2024",
abstract = "In the present paper, the effects of metal ion implantation on the structural and optical properties of TiN thin films have been investigated. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5 × 1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in the form of a fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers, the cubic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. These changes were correlated with the depth distribution of Au, Ag and Cu ions and assigned to implantation-induced damage that was larger when higher ion energies were used. High-resolution XPS spectra of the surface of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases and this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For the as deposited film we found an energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, the existence of additional energy levels, at photon energies below 2.9 eV was observed. Besides, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag implanted films compared to Cu implantations was ascribed to larger structural defects and the formation of less favorable electronic states.",
publisher = "Elsevier",
journal = "Journal of Alloys and Compounds",
title = "Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: The effects of surface oxidation and ion-induced defects",
pages = "173046",
volume = "976",
doi = "10.1016/j.jallcom.2023.173046",
url = "https://hdl.handle.net/21.15107/rcub_dais_16162"
}

Popović, M., Novaković, M., Pjević, D. J., Vaňa, D., Jugović, D., Tošić, D.,& Noga, P.. (2024). Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: The effects of surface oxidation and ion-induced defects. in Journal of Alloys and Compounds
Elsevier., 976, 173046.
https://doi.org/10.1016/j.jallcom.2023.173046
https://hdl.handle.net/21.15107/rcub_dais_16162

Popović M, Novaković M, Pjević DJ, Vaňa D, Jugović D, Tošić D, Noga P. Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: The effects of surface oxidation and ion-induced defects. in Journal of Alloys and Compounds. 2024;976:173046.
doi:10.1016/j.jallcom.2023.173046
https://hdl.handle.net/21.15107/rcub_dais_16162 .

Popović, M., Novaković, M., Pjević, Dejan J., Vaňa, Dušan, Jugović, Dragana, Tošić, D., Noga, Pavol, "Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: The effects of surface oxidation and ion-induced defects" in Journal of Alloys and Compounds, 976 (2024):173046,
https://doi.org/10.1016/j.jallcom.2023.173046 .,
https://hdl.handle.net/21.15107/rcub_dais_16162 .

TY  - CONF
AU  - Popović, M.
AU  - Novaković, M.
AU  - Pjević, Dejan J.
AU  - Vaňa, Dušan
AU  - Jugović, Dragana
AU  - Noga, Pavol
PY  - 2023
UR  - https://dais.sanu.ac.rs/123456789/14869
AB  - The ion implantation technique has a number of advantages over conventional methods for the improvement of thin films that offer the various possibilities of their use in different industrial and technological fields. Herein, we present the effects of metal ion implantation on the structural and optical properties of TiN thin films. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5×1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in form of fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers the cubic crystallographic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. Besides, the surface compositional analysis of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases and this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in the crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For as deposited film we found energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, additional energy levels, at photon energies below 2.9 eV were observed. Further, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag-implanted films compared to Cu implantations was ascribed to larger structural defects and formation of less favorable electronic states.
PB  - Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade
C3  - Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia
T1  - Metal ion-implanted TiN thin films: Induced effects on structural and optical properties
SP  - 63
EP  - 63
UR  - https://hdl.handle.net/21.15107/rcub_dais_14869
ER  - 

@conference{
author = "Popović, M. and Novaković, M. and Pjević, Dejan J. and Vaňa, Dušan and Jugović, Dragana and Noga, Pavol",
year = "2023",
abstract = "The ion implantation technique has a number of advantages over conventional methods for the improvement of thin films that offer the various possibilities of their use in different industrial and technological fields. Herein, we present the effects of metal ion implantation on the structural and optical properties of TiN thin films. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5×1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in form of fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers the cubic crystallographic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. Besides, the surface compositional analysis of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases and this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in the crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For as deposited film we found energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, additional energy levels, at photon energies below 2.9 eV were observed. Further, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag-implanted films compared to Cu implantations was ascribed to larger structural defects and formation of less favorable electronic states.",
publisher = "Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade",
journal = "Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia",
title = "Metal ion-implanted TiN thin films: Induced effects on structural and optical properties",
pages = "63-63",
url = "https://hdl.handle.net/21.15107/rcub_dais_14869"
}

Popović, M., Novaković, M., Pjević, D. J., Vaňa, D., Jugović, D.,& Noga, P.. (2023). Metal ion-implanted TiN thin films: Induced effects on structural and optical properties. in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia
Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade., 63-63.
https://hdl.handle.net/21.15107/rcub_dais_14869

Popović M, Novaković M, Pjević DJ, Vaňa D, Jugović D, Noga P. Metal ion-implanted TiN thin films: Induced effects on structural and optical properties. in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia. 2023;:63-63.
https://hdl.handle.net/21.15107/rcub_dais_14869 .

Popović, M., Novaković, M., Pjević, Dejan J., Vaňa, Dušan, Jugović, Dragana, Noga, Pavol, "Metal ion-implanted TiN thin films: Induced effects on structural and optical properties" in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia (2023):63-63,
https://hdl.handle.net/21.15107/rcub_dais_14869 .

TY  - CONF
AU  - Rajić, Vladimir
AU  - Marković, Smilja
AU  - Popović, M.
AU  - Novaković, M.
AU  - Veselinović, Ljiljana
AU  - Stojković Simatović, Ivana
AU  - Škapin, Srečo Davor
AU  - Stojadinović, S.
AU  - Rac, Vladislav
PY  - 2023
UR  - https://dais.sanu.ac.rs/123456789/14868
AB  - Zink oxide-based materials have a great potential to be applied in photo and electro catalysts, opto-electronic (indoor illumination, LED), etc. Attractiveness of ZnO is attributed to wide bandgap energy at room temperature (3.37 eV), high electron mobility and transfer efficiency (115-155 cm2·V-1·s-1), large exciton binding energy (60 meV), intrinsic stability, nontoxicity, environmental compatibility and also, simple and not expensive synthesis procedure. A lot of different approaches can be used to modify the bandgap (i.e. optical absorption) of ZnO materials: metal and nonmetal ion doping, hydrogenation, the incorporation of crystalline defects in the form of V and I, modification of particles morphology and surface topology, etc.
In this study, eco-friendly and rapid microwave processing of a precipitate was used to produce Fe-doped ZnO nanoparticles with 5, 10, 15 and 20 at.% of Fe (Zn1-xFeyO(1-x+1.5y)). The influence of different amount of Fe substituted Zn in ZnO on the crystal structure, morphological, textural, and optical properties as well as on functionality of ZnO particles was investigated. The crystal structure and phase purity of the Zn1-xFeyO(1-x+1.5y) particles were determined by X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Effects of the Fe3+ amount on particles morphology and texture properties were observed with field emission scanning electron microscopy (FE–SEM), transmission electron microscopy (TEM) and nitrogen adsorption–desorption isotherm, respectively. Optical properties were studied using UV-Vis diffuse reflectance and photoluminescence spectroscopy. Functionality of ZnO particles was studied due to their photocatalytic and electrochemical activities. Photocatalytic activity was examined via decolorization of methylene blue under direct sunlight irradiation. Electrochemical behavior of the ZnO samples as anode material was evaluated by linear sweep voltammetry in 0.5 M Na2SO4 electrolyte.
PB  - Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade
C3  - Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia
T1  - Crystal structure, optical properties and photo/electrocatalytic activity of nanostructured Zn1-xFeyO(1-x+1.5y)
SP  - 34
EP  - 34
UR  - https://hdl.handle.net/21.15107/rcub_dais_14868
ER  - 

@conference{
author = "Rajić, Vladimir and Marković, Smilja and Popović, M. and Novaković, M. and Veselinović, Ljiljana and Stojković Simatović, Ivana and Škapin, Srečo Davor and Stojadinović, S. and Rac, Vladislav",
year = "2023",
abstract = "Zink oxide-based materials have a great potential to be applied in photo and electro catalysts, opto-electronic (indoor illumination, LED), etc. Attractiveness of ZnO is attributed to wide bandgap energy at room temperature (3.37 eV), high electron mobility and transfer efficiency (115-155 cm2·V-1·s-1), large exciton binding energy (60 meV), intrinsic stability, nontoxicity, environmental compatibility and also, simple and not expensive synthesis procedure. A lot of different approaches can be used to modify the bandgap (i.e. optical absorption) of ZnO materials: metal and nonmetal ion doping, hydrogenation, the incorporation of crystalline defects in the form of V and I, modification of particles morphology and surface topology, etc.
In this study, eco-friendly and rapid microwave processing of a precipitate was used to produce Fe-doped ZnO nanoparticles with 5, 10, 15 and 20 at.% of Fe (Zn1-xFeyO(1-x+1.5y)). The influence of different amount of Fe substituted Zn in ZnO on the crystal structure, morphological, textural, and optical properties as well as on functionality of ZnO particles was investigated. The crystal structure and phase purity of the Zn1-xFeyO(1-x+1.5y) particles were determined by X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Effects of the Fe3+ amount on particles morphology and texture properties were observed with field emission scanning electron microscopy (FE–SEM), transmission electron microscopy (TEM) and nitrogen adsorption–desorption isotherm, respectively. Optical properties were studied using UV-Vis diffuse reflectance and photoluminescence spectroscopy. Functionality of ZnO particles was studied due to their photocatalytic and electrochemical activities. Photocatalytic activity was examined via decolorization of methylene blue under direct sunlight irradiation. Electrochemical behavior of the ZnO samples as anode material was evaluated by linear sweep voltammetry in 0.5 M Na2SO4 electrolyte.",
publisher = "Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade",
journal = "Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia",
title = "Crystal structure, optical properties and photo/electrocatalytic activity of nanostructured Zn1-xFeyO(1-x+1.5y)",
pages = "34-34",
url = "https://hdl.handle.net/21.15107/rcub_dais_14868"
}

Rajić, V., Marković, S., Popović, M., Novaković, M., Veselinović, L., Stojković Simatović, I., Škapin, S. D., Stojadinović, S.,& Rac, V.. (2023). Crystal structure, optical properties and photo/electrocatalytic activity of nanostructured Zn1-xFeyO(1-x+1.5y). in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia
Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade., 34-34.
https://hdl.handle.net/21.15107/rcub_dais_14868

Rajić V, Marković S, Popović M, Novaković M, Veselinović L, Stojković Simatović I, Škapin SD, Stojadinović S, Rac V. Crystal structure, optical properties and photo/electrocatalytic activity of nanostructured Zn1-xFeyO(1-x+1.5y). in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia. 2023;:34-34.
https://hdl.handle.net/21.15107/rcub_dais_14868 .

Rajić, Vladimir, Marković, Smilja, Popović, M., Novaković, M., Veselinović, Ljiljana, Stojković Simatović, Ivana, Škapin, Srečo Davor, Stojadinović, S., Rac, Vladislav, "Crystal structure, optical properties and photo/electrocatalytic activity of nanostructured Zn1-xFeyO(1-x+1.5y)" in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia (2023):34-34,
https://hdl.handle.net/21.15107/rcub_dais_14868 .