Metal ion-implanted TiN thin films: Induced effects on structural and optical properties
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
The ion implantation technique has a number of advantages over conventional methods for the improvement of thin films that offer the various possibilities of their use in different industrial and technological fields. Herein, we present the effects of metal ion implantation on the structural and optical properties of TiN thin films. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5×1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in form of fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers the cubic crystallographic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. Besides, the surface compositional analysis of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases a...nd this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in the crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For as deposited film we found energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, additional energy levels, at photon energies below 2.9 eV were observed. Further, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag-implanted films compared to Cu implantations was ascribed to larger structural defects and formation of less favorable electronic states.
Кључне речи:
thin films / TiN films / metal ion implantationИзвор:
Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia, 2023, 63-63Издавач:
- Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade
Институција/група
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - CONF AU - Popović, M. AU - Novaković, M. AU - Pjević, Dejan J. AU - Vaňa, Dušan AU - Jugović, Dragana AU - Noga, Pavol PY - 2023 UR - https://dais.sanu.ac.rs/123456789/14869 AB - The ion implantation technique has a number of advantages over conventional methods for the improvement of thin films that offer the various possibilities of their use in different industrial and technological fields. Herein, we present the effects of metal ion implantation on the structural and optical properties of TiN thin films. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5×1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in form of fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers the cubic crystallographic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. Besides, the surface compositional analysis of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases and this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in the crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For as deposited film we found energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, additional energy levels, at photon energies below 2.9 eV were observed. Further, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag-implanted films compared to Cu implantations was ascribed to larger structural defects and formation of less favorable electronic states. PB - Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade C3 - Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia T1 - Metal ion-implanted TiN thin films: Induced effects on structural and optical properties SP - 63 EP - 63 UR - https://hdl.handle.net/21.15107/rcub_dais_14869 ER -
@conference{ author = "Popović, M. and Novaković, M. and Pjević, Dejan J. and Vaňa, Dušan and Jugović, Dragana and Noga, Pavol", year = "2023", abstract = "The ion implantation technique has a number of advantages over conventional methods for the improvement of thin films that offer the various possibilities of their use in different industrial and technological fields. Herein, we present the effects of metal ion implantation on the structural and optical properties of TiN thin films. TiN films of 170 nm thickness were grown by d.c. reactive sputtering on Si (100) wafers and then irradiated at 5×1016 ions/cm2 with either Au, Ag, or Cu ions by using two different energies per each implanted metal. The results showed that as deposited TiN crystallizes in form of fcc cubic structure, with the crystallites preferentially oriented along the (111) plane. For all implanted layers the cubic crystallographic structure was preserved, but compared to as deposited TiN the crystallites were smaller and the lattice was contracted. Besides, the surface compositional analysis of as deposited sample showed the coexistence of TiN, TiO2 and TiOxNy phases and this was related to the surface oxidation of the films due to the exposure to air. After implantation, the results were almost similar for all metals, showing an increase in TiO2 contribution and the formation of pure metallic Au and Ag phases, while copper is in the Cu2+ state, which is attributed to Cu(II)-oxide and Cu(OH)2. The microstructural characteristics including defect formation, changes in the crystallite size and lattice contraction, and also growth of different metallic phases during implantations were correlated with the findings of the optical characterization of the implanted films. For as deposited film we found energy gap of 2.91 eV, which was lower than the value typical for TiN. After implantation the gap was shifted to higher energies, while at the visible part of the region, additional energy levels, at photon energies below 2.9 eV were observed. Further, all implanted films showed degraded photocatalytic activity compared to as deposited TiN, among which Cu-implanted samples exhibited the best photocatalytic performances. The lower photocatalytic activity of Au and Ag-implanted films compared to Cu implantations was ascribed to larger structural defects and formation of less favorable electronic states.", publisher = "Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade", journal = "Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia", title = "Metal ion-implanted TiN thin films: Induced effects on structural and optical properties", pages = "63-63", url = "https://hdl.handle.net/21.15107/rcub_dais_14869" }
Popović, M., Novaković, M., Pjević, D. J., Vaňa, D., Jugović, D.,& Noga, P.. (2023). Metal ion-implanted TiN thin films: Induced effects on structural and optical properties. in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia Belgrade : Vinča Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade., 63-63. https://hdl.handle.net/21.15107/rcub_dais_14869
Popović M, Novaković M, Pjević DJ, Vaňa D, Jugović D, Noga P. Metal ion-implanted TiN thin films: Induced effects on structural and optical properties. in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia. 2023;:63-63. https://hdl.handle.net/21.15107/rcub_dais_14869 .
Popović, M., Novaković, M., Pjević, Dejan J., Vaňa, Dušan, Jugović, Dragana, Noga, Pavol, "Metal ion-implanted TiN thin films: Induced effects on structural and optical properties" in Book of abstracts / IX International School and Conference on Photonics PHOTONICA2023 with joint events: Understanding interaction light - biological surfaces possibility for new electronic materials and devices & Biological and bioinspired structures for multispectral surveillance & Quantum sensing integration within microfluidic Lab-on-a Chips for biomedical applications, August 28 - September 01, 2023, Belgrade, Serbia (2023):63-63, https://hdl.handle.net/21.15107/rcub_dais_14869 .