@article{
author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2020",
abstract = "Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Theoretical investigation of a miniature microwave driven plasma jet",
pages = "065018",
volume = "29",
number = "6",
doi = "10.1088/1361-6595/ab9483",
url = "https://hdl.handle.net/21.15107/rcub_dais_9987"
}