Theoretical investigation of a miniature microwave driven plasma jet
Аутори
Klute, MichaelPorteanu, Horia-Eugen
Stefanović, Ilija
Heinrich, Wolfgang
Awakowicz, Peter
Brinkmann, Ralf Peter
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.
Кључне речи:
miniature micro wave ICP / miniature microwave driven plasma jet / LC-resonators / MMWICPИзвор:
Plasma Sources Science and Technology, 2020, 29, 6, 065018-Издавач:
- IOP Publishing
Финансирање / пројекти:
- Deutsche Forschungsgemeinschaft DFG, Project 389090373
DOI: 10.1088/1361-6595/ab9483
ISSN: 1361-6595; 0963-0252
WoS: 000546910900001
Scopus: 2-s2.0-85088296646
Институција/група
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - JOUR AU - Klute, Michael AU - Porteanu, Horia-Eugen AU - Stefanović, Ilija AU - Heinrich, Wolfgang AU - Awakowicz, Peter AU - Brinkmann, Ralf Peter PY - 2020 UR - https://dais.sanu.ac.rs/123456789/9987 AB - Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior. PB - IOP Publishing T2 - Plasma Sources Science and Technology T1 - Theoretical investigation of a miniature microwave driven plasma jet SP - 065018 VL - 29 IS - 6 DO - 10.1088/1361-6595/ab9483 UR - https://hdl.handle.net/21.15107/rcub_dais_9987 ER -
@article{ author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter", year = "2020", abstract = "Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.", publisher = "IOP Publishing", journal = "Plasma Sources Science and Technology", title = "Theoretical investigation of a miniature microwave driven plasma jet", pages = "065018", volume = "29", number = "6", doi = "10.1088/1361-6595/ab9483", url = "https://hdl.handle.net/21.15107/rcub_dais_9987" }
Klute, M., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2020). Theoretical investigation of a miniature microwave driven plasma jet. in Plasma Sources Science and Technology IOP Publishing., 29(6), 065018. https://doi.org/10.1088/1361-6595/ab9483 https://hdl.handle.net/21.15107/rcub_dais_9987
Klute M, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Theoretical investigation of a miniature microwave driven plasma jet. in Plasma Sources Science and Technology. 2020;29(6):065018. doi:10.1088/1361-6595/ab9483 https://hdl.handle.net/21.15107/rcub_dais_9987 .
Klute, Michael, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Theoretical investigation of a miniature microwave driven plasma jet" in Plasma Sources Science and Technology, 29, no. 6 (2020):065018, https://doi.org/10.1088/1361-6595/ab9483 ., https://hdl.handle.net/21.15107/rcub_dais_9987 .