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Theoretical investigation of a miniature microwave driven plasma jet
dc.creator | Klute, Michael | |
dc.creator | Porteanu, Horia-Eugen | |
dc.creator | Stefanović, Ilija | |
dc.creator | Heinrich, Wolfgang | |
dc.creator | Awakowicz, Peter | |
dc.creator | Brinkmann, Ralf Peter | |
dc.date.accessioned | 2020-12-20T17:24:54Z | |
dc.date.available | 2020-12-20T17:24:54Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1361-6595 | |
dc.identifier.issn | 0963-0252 | |
dc.identifier.uri | https://dais.sanu.ac.rs/123456789/9987 | |
dc.description.abstract | Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior. | en |
dc.publisher | IOP Publishing | |
dc.relation | Deutsche Forschungsgemeinschaft DFG, Project 389090373 | |
dc.rights | openAccess | |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | |
dc.source | Plasma Sources Science and Technology | |
dc.subject | miniature micro wave ICP | |
dc.subject | miniature microwave driven plasma jet | |
dc.subject | LC-resonators | |
dc.subject | MMWICP | |
dc.title | Theoretical investigation of a miniature microwave driven plasma jet | en |
dc.type | article | en |
dc.rights.license | BY | |
dcterms.abstract | Стефановић, Илија; Портеану, Хориа-Еуген; Клуте, Мицхаел; Хеинрицх, Wолфганг; Бринкманн, Ралф Петер; Awакоwицз, Петер; | |
dc.citation.spage | 065018 | |
dc.citation.volume | 29 | |
dc.citation.issue | 6 | |
dc.identifier.wos | 000546910900001 | |
dc.identifier.doi | 10.1088/1361-6595/ab9483 | |
dc.identifier.scopus | 2-s2.0-85088296646 | |
dc.type.version | publishedVersion | |
dc.identifier.fulltext | https://dais.sanu.ac.rs/bitstream/id/41201/Klute_2020_Plasma_Sources_Sci._Technol._29_065018.pdf | |
dc.identifier.rcub | https://hdl.handle.net/21.15107/rcub_dais_9987 |