Material characterization SEM modern methods

Abstract

Detailed analysis was carried out and systematization of methods used in the characterization of materials using SEM. We analyzed its operation. Attention was paid to its major parts. Specially to the electron gun and lens. Also, comparisons of forming character oprickim microscope and SEM. In further analysis we have studied differences between EDS and WDS.. The EDS features measurement with a small probe current, short-time acquisition of spectra, etc. WDS features a high energy (wavelength) resolution, detection of trace elements. Most SEMs are equipped with an EDS, whereas a WDS is generally used as an Electron Probe Microanalyzer (EPMA) that mainly performs elemental analysis.