Detailed analysis was carried out and systematization of methods used in the characterization of materials using SEM. We analyzed its operation. Attention was paid to its major parts. Specially to the electron gun and lens. Also, comparisons of forming character oprickim microscope and SEM. In further analysis we have studied differences between EDS and WDS.. The EDS features measurement with a small probe current, short-time acquisition of spectra, etc. WDS features a high energy (wavelength) resolution, detection of trace elements. Most SEMs are equipped with an EDS, whereas a WDS is generally used as an Electron Probe Microanalyzer (EPMA) that mainly performs elemental analysis.
Keywords:
scanning electron microscopy
Source:
Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : V Serbian Ceramic Society Conference, Sep 21-23 September 2016, Belgrade, 2016, 72-72
TY - CONF
AU - Veljković, Sandra
AU - Mitić, Vojislav V.
AU - Kocić, Ljubiša
AU - Paunović, Vesna
PY - 2016
UR - https://dais.sanu.ac.rs/123456789/880
AB - Detailed analysis was carried out and systematization of methods used in the characterization of materials using SEM. We analyzed its operation. Attention was paid to its major parts. Specially to the electron gun and lens. Also, comparisons of forming character oprickim microscope and SEM. In further analysis we have studied differences between EDS and WDS.. The EDS features measurement with a small probe current, short-time acquisition of spectra, etc. WDS features a high energy (wavelength) resolution, detection of trace elements. Most SEMs are equipped with an EDS, whereas a WDS is generally used as an Electron Probe Microanalyzer (EPMA) that mainly performs elemental analysis.
PB - Belgrade : Serbian Ceramic Society
C3 - Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : V Serbian Ceramic Society Conference, Sep 21-23 September 2016, Belgrade
T1 - Material characterization SEM modern methods
SP - 72
EP - 72
UR - https://hdl.handle.net/21.15107/rcub_dais_880
ER -
@conference{
author = "Veljković, Sandra and Mitić, Vojislav V. and Kocić, Ljubiša and Paunović, Vesna",
year = "2016",
abstract = "Detailed analysis was carried out and systematization of methods used in the characterization of materials using SEM. We analyzed its operation. Attention was paid to its major parts. Specially to the electron gun and lens. Also, comparisons of forming character oprickim microscope and SEM. In further analysis we have studied differences between EDS and WDS.. The EDS features measurement with a small probe current, short-time acquisition of spectra, etc. WDS features a high energy (wavelength) resolution, detection of trace elements. Most SEMs are equipped with an EDS, whereas a WDS is generally used as an Electron Probe Microanalyzer (EPMA) that mainly performs elemental analysis.",
publisher = "Belgrade : Serbian Ceramic Society",
journal = "Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : V Serbian Ceramic Society Conference, Sep 21-23 September 2016, Belgrade",
title = "Material characterization SEM modern methods",
pages = "72-72",
url = "https://hdl.handle.net/21.15107/rcub_dais_880"
}
Veljković, S., Mitić, V. V., Kocić, L.,& Paunović, V.. (2016). Material characterization SEM modern methods. in Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : V Serbian Ceramic Society Conference, Sep 21-23 September 2016, Belgrade
Belgrade : Serbian Ceramic Society., 72-72.
https://hdl.handle.net/21.15107/rcub_dais_880
Veljković S, Mitić VV, Kocić L, Paunović V. Material characterization SEM modern methods. in Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : V Serbian Ceramic Society Conference, Sep 21-23 September 2016, Belgrade. 2016;:72-72.
https://hdl.handle.net/21.15107/rcub_dais_880 .
Veljković, Sandra, Mitić, Vojislav V., Kocić, Ljubiša, Paunović, Vesna, "Material characterization SEM modern methods" in Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : V Serbian Ceramic Society Conference, Sep 21-23 September 2016, Belgrade (2016):72-72,
https://hdl.handle.net/21.15107/rcub_dais_880 .
