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Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids

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2012
Authors
Matović, Jovan
Jakšić, Zoran
Radovanović, Filip
Conference object (Published version)
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Abstract
Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.
Keywords:
nanomembranes / thin film deposition / solvents / sacrificial layers / solvent reflow
Source:
Proceedings of the 28th International Conference on Microelectronics MIEL 2012, 2012, 135-138
Publisher:
  • IEEE
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
  • Austrian Science Fund (FWF), Metalcomposite Nanomembranes for Advanced Infrared Photonics (L521)

DOI: 10.1109/MIEL.2012.6222816

Scopus: 2-s2.0-84864241170
[ Google Scholar ]
URI
http://dais.sanu.ac.rs/123456789/781
Collections
  • Radovi istraživača pre dolaska u ITN SANU
Institution
Институт техничких наука САНУ / Institute of Technical Sciences of SASA
TY  - CONF
AU  - Matović, Jovan
AU  - Jakšić, Zoran
AU  - Radovanović, Filip
PY  - 2012
UR  - http://dais.sanu.ac.rs/123456789/781
AB  - Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.
PB  - IEEE
C3  - Proceedings of the 28th International Conference on Microelectronics MIEL 2012
T1  - Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids
SP  - 135
EP  - 138
DO  - 10.1109/MIEL.2012.6222816
ER  - 
@conference{
author = "Matović, Jovan and Jakšić, Zoran and Radovanović, Filip",
year = "2012",
url = "http://dais.sanu.ac.rs/123456789/781",
abstract = "Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.",
publisher = "IEEE",
journal = "Proceedings of the 28th International Conference on Microelectronics MIEL 2012",
title = "Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids",
pages = "135-138",
doi = "10.1109/MIEL.2012.6222816"
}
Matović J, Jakšić Z, Radovanović F. Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids. Proceedings of the 28th International Conference on Microelectronics MIEL 2012. 2012;:135-138
Matović, J., Jakšić, Z.,& Radovanović, F. (2012). Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids.
Proceedings of the 28th International Conference on Microelectronics MIEL 2012IEEE., null, 135-138. 
https://doi.org/10.1109/MIEL.2012.6222816
Matović Jovan, Jakšić Zoran, Radovanović Filip, "Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids" null (2012):135-138,
https://doi.org/10.1109/MIEL.2012.6222816 .

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