Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids
Abstract
Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.
Keywords:
nanomembranes / thin film deposition / solvents / sacrificial layers / solvent reflowSource:
Proceedings of the 28th International Conference on Microelectronics MIEL 2012, 2012, 135-138Publisher:
- IEEE
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Austrian Science Fund (FWF), Metalcomposite Nanomembranes for Advanced Infrared Photonics (L521)
Institution/Community
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - CONF AU - Matović, Jovan AU - Jakšić, Zoran AU - Radovanović, Filip PY - 2012 UR - https://dais.sanu.ac.rs/123456789/781 AB - Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure. PB - IEEE C3 - Proceedings of the 28th International Conference on Microelectronics MIEL 2012 T1 - Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids SP - 135 EP - 138 DO - 10.1109/MIEL.2012.6222816 UR - https://hdl.handle.net/21.15107/rcub_dais_781 ER -
@conference{ author = "Matović, Jovan and Jakšić, Zoran and Radovanović, Filip", year = "2012", abstract = "Nanomembranes represent a novel building block for nanosystems, characterized by a thickness below 100 nm and a giant aspect ratios. A typical procedure for nanomembrane fabrication starts from an ultrathin layer deposited on some kind of a sacrificial substrate. The nanomembrane is released by etching away the substrate, leaving the nanomembrane to freely float in the solvent. This solvent may be water or some other liquid. Many different types of nanomembranes can be made by this procedure, but only a limited number can survive the capillary forces during the extraction from solvent. In this paper we propose a novel, generally applicable method for freeing nanomembranes from the solvent via direct in-situ substitution of the solvent in meniscus with a low surface tension liquid. The proposed method ensures high production yields, is not very dependent on experimental skills, and avoids introduction of contaminants into the nanomembrane structure.", publisher = "IEEE", journal = "Proceedings of the 28th International Conference on Microelectronics MIEL 2012", title = "Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids", pages = "135-138", doi = "10.1109/MIEL.2012.6222816", url = "https://hdl.handle.net/21.15107/rcub_dais_781" }
Matović, J., Jakšić, Z.,& Radovanović, F.. (2012). Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids. in Proceedings of the 28th International Conference on Microelectronics MIEL 2012 IEEE., 135-138. https://doi.org/10.1109/MIEL.2012.6222816 https://hdl.handle.net/21.15107/rcub_dais_781
Matović J, Jakšić Z, Radovanović F. Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids. in Proceedings of the 28th International Conference on Microelectronics MIEL 2012. 2012;:135-138. doi:10.1109/MIEL.2012.6222816 https://hdl.handle.net/21.15107/rcub_dais_781 .
Matović, Jovan, Jakšić, Zoran, Radovanović, Filip, "Transfer of nanomembranes from solution to a solid frame via reflow of low surface tension liquids" in Proceedings of the 28th International Conference on Microelectronics MIEL 2012 (2012):135-138, https://doi.org/10.1109/MIEL.2012.6222816 ., https://hdl.handle.net/21.15107/rcub_dais_781 .