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dc.creatorStefanović, Ilija
dc.creatorBibinov, Nikita
dc.creatorPorteanu, Horia-Eugen
dc.creatorKlute, Michael
dc.creatorBrinkmann, Ralf Peter
dc.creatorAwakowicz, Peter
dc.date.accessioned2020-01-08T18:34:47Z
dc.date.available2020-01-08T18:34:47Z
dc.date.issued2019
dc.identifier.isbn978-80-8147-089-9
dc.identifier.urihttp://dais.sanu.ac.rs/123456789/6996
dc.description.abstractMiniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.en
dc.language.isoensr
dc.publisherBratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislavasr
dc.publisherBratislava : ociety for Plasma Research and Applicationssr
dc.rightsopenAccesssr
dc.sourceBook of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019sr
dc.subjectMiniature Microwave Inductively Coupled Plasma sourcesr
dc.subjectOptical Emission Spectroscopy (OES)sr
dc.titleNew and versatile minature microwave plasma sourceen
dc.typeconferenceObjectsr
dc.rights.licenseBY-NC-NDsr
dcterms.abstractБибинов, Никита; Бринкманн, Ралф Петер; Стефановић, Илија; Портеану, Хориа-Еуген; Клуте, Мицхаел; Awакоwицз, Петер;
dc.type.versionpublishedVersionsr
dc.identifier.fulltexthttp://dais.sanu.ac.rs/bitstream/id/27780/SAPP-IS.pdf


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