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dc.creatorPorteanu, Horia-Eugen
dc.creatorStefanović, Ilija
dc.creatorBibinov, Nikita
dc.creatorKlute, Michael
dc.creatorAwakowicz, Peter
dc.creatorBrinkmann, Ralf Peter
dc.creatorHeinrich, Wolfgang
dc.date.accessioned2020-01-04T13:52:48Z
dc.date.available2020-01-04T13:52:48Z
dc.date.issued2019
dc.identifier.isbn0963-0252
dc.identifier.issn0963-0252
dc.identifier.urihttp://dais.sanu.ac.rs/123456789/6956
dc.description.abstractMicrowave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.en
dc.languageen
dc.publisherIOP Publishing
dc.relationDFG, project No. 389090373
dc.rightsrestrictedAccess
dc.sourcePlasma Sources Science and Technology
dc.titleCorrelated mode analysis of a microwave driven ICP sourceen
dc.typearticleen
dc.rights.licenseARR
dcterms.abstractБибинов, Никита; Awакоwицз, Петер; Клуте, Мицхаел; Бринкманн, Ралф Петер; Хеинрицх, Wолфганг; Стефановић, Илија; Портеану, Хориа-Еуген;
dc.citation.spage035013
dc.citation.volume28
dc.citation.issue3
dc.identifier.wos000461516000002
dc.identifier.doi10.1088/1361-6595/ab06a7
dc.identifier.scopus2-s2.0-85066246871
dc.type.versionpublishedVersion


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