Correlated mode analysis of a microwave driven ICP source
Authorized Users Only
2019
Authors
Porteanu, Horia-Eugen
Stefanović, Ilija

Bibinov, Nikita
Klute, Michael

Awakowicz, Peter
Brinkmann, Ralf Peter

Heinrich, Wolfgang
Article (Published version)

Metadata
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Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the elect...ron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.
Source:
Plasma Sources Science and Technology, 2019, 28, 3, 035013-Publisher:
- IOP Publishing
Funding / projects:
- Deutsche Forschungsgemeinschaft DFG, Project 389090373
DOI: 10.1088/1361-6595/ab06a7
ISBN: 0963-0252
ISSN: 0963-0252
WoS: 000461516000002
Scopus: 2-s2.0-85066246871
Institution/Community
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - JOUR AU - Porteanu, Horia-Eugen AU - Stefanović, Ilija AU - Bibinov, Nikita AU - Klute, Michael AU - Awakowicz, Peter AU - Brinkmann, Ralf Peter AU - Heinrich, Wolfgang PY - 2019 UR - https://dais.sanu.ac.rs/123456789/6956 AB - Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present. PB - IOP Publishing T2 - Plasma Sources Science and Technology T1 - Correlated mode analysis of a microwave driven ICP source SP - 035013 VL - 28 IS - 3 DO - 10.1088/1361-6595/ab06a7 UR - https://hdl.handle.net/21.15107/rcub_dais_6956 ER -
@article{ author = "Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Klute, Michael and Awakowicz, Peter and Brinkmann, Ralf Peter and Heinrich, Wolfgang", year = "2019", abstract = "Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.", publisher = "IOP Publishing", journal = "Plasma Sources Science and Technology", title = "Correlated mode analysis of a microwave driven ICP source", pages = "035013", volume = "28", number = "3", doi = "10.1088/1361-6595/ab06a7", url = "https://hdl.handle.net/21.15107/rcub_dais_6956" }
Porteanu, H., Stefanović, I., Bibinov, N., Klute, M., Awakowicz, P., Brinkmann, R. P.,& Heinrich, W.. (2019). Correlated mode analysis of a microwave driven ICP source. in Plasma Sources Science and Technology IOP Publishing., 28(3), 035013. https://doi.org/10.1088/1361-6595/ab06a7 https://hdl.handle.net/21.15107/rcub_dais_6956
Porteanu H, Stefanović I, Bibinov N, Klute M, Awakowicz P, Brinkmann RP, Heinrich W. Correlated mode analysis of a microwave driven ICP source. in Plasma Sources Science and Technology. 2019;28(3):035013. doi:10.1088/1361-6595/ab06a7 https://hdl.handle.net/21.15107/rcub_dais_6956 .
Porteanu, Horia-Eugen, Stefanović, Ilija, Bibinov, Nikita, Klute, Michael, Awakowicz, Peter, Brinkmann, Ralf Peter, Heinrich, Wolfgang, "Correlated mode analysis of a microwave driven ICP source" in Plasma Sources Science and Technology, 28, no. 3 (2019):035013, https://doi.org/10.1088/1361-6595/ab06a7 ., https://hdl.handle.net/21.15107/rcub_dais_6956 .