Characterization of adsorption-desorption (AD) processes of gas particles on semiconductors is necessary in order to investigate the influence of these processes on the micro/nano-devices performance. By applying a numerical computational method we determined the pressure dependence of the equilibrium coverage of the semiconductor surface by chemisorbed gas particles. We concluded that the pressure dependence of the total coverage of the surface by adparticles, and also of coverages by both the neutral and ionized adparticles, can be obtained by measuring the adsorbed mass. We propose the use of nanocantilever sensors for such extremely sensitive mass measurements. The obtained adsorption induced cantilever's resonant frequency shifts are higher than the detection threshold set by the termomechanical noise. This confirms the applicability of the used nanocantilever sensor for experimental characterization of AD processes at semiconductor surfaces.
TY - JOUR
AU - Obradović, Nina
AU - Terzić, Anja
AU - Pavlović, Ljubica
AU - Filipović, Suzana
AU - Pavlović, Vladimir B.
PY - 2012
UR - https://dais.sanu.ac.rs/123456789/491
AB - Characterization of adsorption-desorption (AD) processes of gas particles on semiconductors is necessary in order to investigate the influence of these processes on the micro/nano-devices performance. By applying a numerical computational method we determined the pressure dependence of the equilibrium coverage of the semiconductor surface by chemisorbed gas particles. We concluded that the pressure dependence of the total coverage of the surface by adparticles, and also of coverages by both the neutral and ionized adparticles, can be obtained by measuring the adsorbed mass. We propose the use of nanocantilever sensors for such extremely sensitive mass measurements. The obtained adsorption induced cantilever's resonant frequency shifts are higher than the detection threshold set by the termomechanical noise. This confirms the applicability of the used nanocantilever sensor for experimental characterization of AD processes at semiconductor surfaces.
PB - Amsterdam : Springer Netherlands
T2 - Journal of Thermal Analysis and Calorimetry
T1 - Dehydration investigations of a refractory concrete using DTA method
SP - 37
EP - 41
VL - 110
IS - 1
DO - 10.1007/s10973-011-1880-3
UR - https://hdl.handle.net/21.15107/rcub_dais_491
ER -
@article{
author = "Obradović, Nina and Terzić, Anja and Pavlović, Ljubica and Filipović, Suzana and Pavlović, Vladimir B.",
year = "2012",
abstract = "Characterization of adsorption-desorption (AD) processes of gas particles on semiconductors is necessary in order to investigate the influence of these processes on the micro/nano-devices performance. By applying a numerical computational method we determined the pressure dependence of the equilibrium coverage of the semiconductor surface by chemisorbed gas particles. We concluded that the pressure dependence of the total coverage of the surface by adparticles, and also of coverages by both the neutral and ionized adparticles, can be obtained by measuring the adsorbed mass. We propose the use of nanocantilever sensors for such extremely sensitive mass measurements. The obtained adsorption induced cantilever's resonant frequency shifts are higher than the detection threshold set by the termomechanical noise. This confirms the applicability of the used nanocantilever sensor for experimental characterization of AD processes at semiconductor surfaces.",
publisher = "Amsterdam : Springer Netherlands",
journal = "Journal of Thermal Analysis and Calorimetry",
title = "Dehydration investigations of a refractory concrete using DTA method",
pages = "37-41",
volume = "110",
number = "1",
doi = "10.1007/s10973-011-1880-3",
url = "https://hdl.handle.net/21.15107/rcub_dais_491"
}
Obradović, N., Terzić, A., Pavlović, L., Filipović, S.,& Pavlović, V. B.. (2012). Dehydration investigations of a refractory concrete using DTA method. in Journal of Thermal Analysis and Calorimetry
Amsterdam : Springer Netherlands., 110(1), 37-41.
https://doi.org/10.1007/s10973-011-1880-3
https://hdl.handle.net/21.15107/rcub_dais_491
Obradović N, Terzić A, Pavlović L, Filipović S, Pavlović VB. Dehydration investigations of a refractory concrete using DTA method. in Journal of Thermal Analysis and Calorimetry. 2012;110(1):37-41.
doi:10.1007/s10973-011-1880-3
https://hdl.handle.net/21.15107/rcub_dais_491 .
Obradović, Nina, Terzić, Anja, Pavlović, Ljubica, Filipović, Suzana, Pavlović, Vladimir B., "Dehydration investigations of a refractory concrete using DTA method" in Journal of Thermal Analysis and Calorimetry, 110, no. 1 (2012):37-41,
https://doi.org/10.1007/s10973-011-1880-3 .,
https://hdl.handle.net/21.15107/rcub_dais_491 .
