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Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow

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2018
Stefanovic+et+al_2018_Plasma_Sources_Sci._Technol._10.1088_1361-6595_aaefcc.pdf (2.289Mb)
Authors
Stefanović, Ilija
Bibinov, Nikita
Porteanu, Horia-Eugen
Klute, Michael
Brinkmann, Ralf-Peter
Awakowicz, Peter
Article (Accepted Version)
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Abstract
Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions ...the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.

Source:
Plasma Sources Science and Technology, 2018, 27, 12, 12LT01-
Publisher:
  • IOP Publishing
Funding / projects:
  • Deutsche Forschungsgemeinschaft DFG, Project 389090373

DOI: 10.1088/1361-6595/aaefcc

ISSN: 1361-6595

WoS: 000454246000001

Scopus: 2-s2.0-85060149167
[ Google Scholar ]
8
8
Handle
https://hdl.handle.net/21.15107/rcub_dais_4640
URI
http://iopscience.iop.org/10.1088/1361-6595/aaefcc
https://dais.sanu.ac.rs/123456789/4640
Collections
  • ИТН САНУ - Општа колекција / ITS SASA - General collection
Institution/Community
Институт техничких наука САНУ / Institute of Technical Sciences of SASA
TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
UR  - http://iopscience.iop.org/10.1088/1361-6595/aaefcc
UR  - https://dais.sanu.ac.rs/123456789/4640
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4640
ER  - 
@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4640"
}
Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P.. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4640
Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4640 .
Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf-Peter, Awakowicz, Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" in Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .,
https://hdl.handle.net/21.15107/rcub_dais_4640 .

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