Modeling of the conductivity alteration in the gold thin film-based mercury sensor using the fuchs theory
Abstract
We report on the development and testing of the metallic mercury sensor. Sensor is based on the gold thin film layer where sensing is achieved by formation of the gold-mercury amalgam. Complete technological procedure and design is performed at IHTM-CMTM in Belgrade, Serbia. We test the sensor by exposing it to the various mercury concentrations and compare results to the Langmuir adsorption theory. We explain resistivity alteration during gold-mercury adsorption by the Fuchs theory of conductivity in thin films. This is the basis for the more detailed understanding of the sensor functionality.
Keywords:
mercury sensors / thin films / Langmuir adsorption theorySource:
2012 28th International Conference on Microelectronics (MIEL), 2012, 151-153Publisher:
- IEEE
Projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)