3-dimensional semi-analytic model of a microwave driven miniature plasma jet
Authors
Klute, Michael
Kemaneci, Efe
Stefanović, Ilija

Heinrich, Wolfgang
Awakowicz, Peter
Brinkmann, Ralf-Peter

Conference object (Published version)
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Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP) is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental meas...urements.
Keywords:
microwave driven miniature plasma jets / drift-diffusion equation / electron density / semi-analytic modelsSource:
Bulletin of the American Physical Society, 2021, 66, 7, SR54.00007-Publisher:
- Americam Physical Society
Note:
- 74th Annual Gaseous Electronics Conference
Institution/Community
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - CONF AU - Klute, Michael AU - Kemaneci, Efe AU - Stefanović, Ilija AU - Heinrich, Wolfgang AU - Awakowicz, Peter AU - Brinkmann, Ralf-Peter PY - 2021 UR - https://meetings.aps.org/Meeting/GEC21/Session/SR54.7 UR - https://dais.sanu.ac.rs/123456789/12386 AB - Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP) is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental measurements. PB - Americam Physical Society C3 - Bulletin of the American Physical Society T1 - 3-dimensional semi-analytic model of a microwave driven miniature plasma jet SP - SR54.00007 VL - 66 IS - 7 UR - https://hdl.handle.net/21.15107/rcub_dais_12386 ER -
@conference{ author = "Klute, Michael and Kemaneci, Efe and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf-Peter", year = "2021", abstract = "Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP) is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental measurements.", publisher = "Americam Physical Society", journal = "Bulletin of the American Physical Society", title = "3-dimensional semi-analytic model of a microwave driven miniature plasma jet", pages = "SR54.00007", volume = "66", number = "7", url = "https://hdl.handle.net/21.15107/rcub_dais_12386" }
Klute, M., Kemaneci, E., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R.. (2021). 3-dimensional semi-analytic model of a microwave driven miniature plasma jet. in Bulletin of the American Physical Society Americam Physical Society., 66(7), SR54.00007. https://hdl.handle.net/21.15107/rcub_dais_12386
Klute M, Kemaneci E, Stefanović I, Heinrich W, Awakowicz P, Brinkmann R. 3-dimensional semi-analytic model of a microwave driven miniature plasma jet. in Bulletin of the American Physical Society. 2021;66(7):SR54.00007. https://hdl.handle.net/21.15107/rcub_dais_12386 .
Klute, Michael, Kemaneci, Efe, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf-Peter, "3-dimensional semi-analytic model of a microwave driven miniature plasma jet" in Bulletin of the American Physical Society, 66, no. 7 (2021):SR54.00007, https://hdl.handle.net/21.15107/rcub_dais_12386 .