Analyses of the surface parameters in polycrystalline diamonds
Mitić, Vojislav V.
Article (Published version)
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There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.
Keywords:polycrystalline diamonds / microelectronic devices / MEMS / surface properties
Source:Serbian Journal of Electrical Engineering, 2020, 17, 1, 111-129
- Čačak : University of Kragujevac, Faculty of Technical Sciences