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Analyses of the surface parameters in polycrystalline diamonds

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2020
1451-48692001111V.pdf (1.806Mb)
Authors
Veljković, Sandra
Mitić, Vojislav V.
Paunović, Vesna
Lazović, Goran
Mohr, Marcus
Fecht, Hans
Article (Published version)
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Abstract
There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.
Keywords:
polycrystalline diamonds / microelectronic devices / MEMS / surface properties
Source:
Serbian Journal of Electrical Engineering, 2020, 17, 1, 111-129
Publisher:
  • Čačak : University of Kragujevac, Faculty of Technical Sciences
Funding / projects:
  • Directed synthesis, structure and properties of multifunctional materials (RS-172057)

DOI: 10.2298/SJEE2001111V

ISSN: 1451-4869; 2217-7183

Scopus: 2-s2.0-85084129332
[ Google Scholar ]
Handle
https://hdl.handle.net/21.15107/rcub_dais_10046
URI
https://dais.sanu.ac.rs/123456789/10046
Collections
  • ИТН САНУ - Општа колекција / ITS SASA - General collection
Institution/Community
Институт техничких наука САНУ / Institute of Technical Sciences of SASA
TY  - JOUR
AU  - Veljković, Sandra
AU  - Mitić, Vojislav V.
AU  - Paunović, Vesna
AU  - Lazović, Goran
AU  - Mohr, Marcus
AU  - Fecht, Hans
PY  - 2020
UR  - https://dais.sanu.ac.rs/123456789/10046
AB  - There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.
PB  - Čačak : University of Kragujevac, Faculty of Technical Sciences
T2  - Serbian Journal of Electrical Engineering
T1  - Analyses of the surface parameters in polycrystalline diamonds
SP  - 111
EP  - 129
VL  - 17
IS  - 1
DO  - 10.2298/SJEE2001111V
UR  - https://hdl.handle.net/21.15107/rcub_dais_10046
ER  - 
@article{
author = "Veljković, Sandra and Mitić, Vojislav V. and Paunović, Vesna and Lazović, Goran and Mohr, Marcus and Fecht, Hans",
year = "2020",
abstract = "There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.",
publisher = "Čačak : University of Kragujevac, Faculty of Technical Sciences",
journal = "Serbian Journal of Electrical Engineering",
title = "Analyses of the surface parameters in polycrystalline diamonds",
pages = "111-129",
volume = "17",
number = "1",
doi = "10.2298/SJEE2001111V",
url = "https://hdl.handle.net/21.15107/rcub_dais_10046"
}
Veljković, S., Mitić, V. V., Paunović, V., Lazović, G., Mohr, M.,& Fecht, H.. (2020). Analyses of the surface parameters in polycrystalline diamonds. in Serbian Journal of Electrical Engineering
Čačak : University of Kragujevac, Faculty of Technical Sciences., 17(1), 111-129.
https://doi.org/10.2298/SJEE2001111V
https://hdl.handle.net/21.15107/rcub_dais_10046
Veljković S, Mitić VV, Paunović V, Lazović G, Mohr M, Fecht H. Analyses of the surface parameters in polycrystalline diamonds. in Serbian Journal of Electrical Engineering. 2020;17(1):111-129.
doi:10.2298/SJEE2001111V
https://hdl.handle.net/21.15107/rcub_dais_10046 .
Veljković, Sandra, Mitić, Vojislav V., Paunović, Vesna, Lazović, Goran, Mohr, Marcus, Fecht, Hans, "Analyses of the surface parameters in polycrystalline diamonds" in Serbian Journal of Electrical Engineering, 17, no. 1 (2020):111-129,
https://doi.org/10.2298/SJEE2001111V .,
https://hdl.handle.net/21.15107/rcub_dais_10046 .

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