TY  - JOUR
AU  - Klute, Michael
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2020
UR  - https://dais.sanu.ac.rs/123456789/9987
AB  - Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Theoretical investigation of a miniature microwave driven plasma jet
SP  - 065018
VL  - 29
IS  - 6
DO  - 10.1088/1361-6595/ab9483
UR  - https://hdl.handle.net/21.15107/rcub_dais_9987
ER  - 

@article{
author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2020",
abstract = "Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Theoretical investigation of a miniature microwave driven plasma jet",
pages = "065018",
volume = "29",
number = "6",
doi = "10.1088/1361-6595/ab9483",
url = "https://hdl.handle.net/21.15107/rcub_dais_9987"
}

Klute, M., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2020). Theoretical investigation of a miniature microwave driven plasma jet. in Plasma Sources Science and Technology
IOP Publishing., 29(6), 065018.
https://doi.org/10.1088/1361-6595/ab9483
https://hdl.handle.net/21.15107/rcub_dais_9987

Klute M, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Theoretical investigation of a miniature microwave driven plasma jet. in Plasma Sources Science and Technology. 2020;29(6):065018.
doi:10.1088/1361-6595/ab9483
https://hdl.handle.net/21.15107/rcub_dais_9987 .

Klute, Michael, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Theoretical investigation of a miniature microwave driven plasma jet" in Plasma Sources Science and Technology, 29, no. 6 (2020):065018,
https://doi.org/10.1088/1361-6595/ab9483 .,
https://hdl.handle.net/21.15107/rcub_dais_9987 .

TY  - JOUR
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Klute, Michael
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
AU  - Heinrich, Wolfgang
PY  - 2019
UR  - https://dais.sanu.ac.rs/123456789/6956
AB  - Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Correlated mode analysis of a microwave driven ICP source
SP  - 035013
VL  - 28
IS  - 3
DO  - 10.1088/1361-6595/ab06a7
UR  - https://hdl.handle.net/21.15107/rcub_dais_6956
ER  - 

@article{
author = "Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Klute, Michael and Awakowicz, Peter and Brinkmann, Ralf Peter and Heinrich, Wolfgang",
year = "2019",
abstract = "Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Correlated mode analysis of a microwave driven ICP source",
pages = "035013",
volume = "28",
number = "3",
doi = "10.1088/1361-6595/ab06a7",
url = "https://hdl.handle.net/21.15107/rcub_dais_6956"
}

Porteanu, H., Stefanović, I., Bibinov, N., Klute, M., Awakowicz, P., Brinkmann, R. P.,& Heinrich, W.. (2019). Correlated mode analysis of a microwave driven ICP source. in Plasma Sources Science and Technology
IOP Publishing., 28(3), 035013.
https://doi.org/10.1088/1361-6595/ab06a7
https://hdl.handle.net/21.15107/rcub_dais_6956

Porteanu H, Stefanović I, Bibinov N, Klute M, Awakowicz P, Brinkmann RP, Heinrich W. Correlated mode analysis of a microwave driven ICP source. in Plasma Sources Science and Technology. 2019;28(3):035013.
doi:10.1088/1361-6595/ab06a7
https://hdl.handle.net/21.15107/rcub_dais_6956 .

Porteanu, Horia-Eugen, Stefanović, Ilija, Bibinov, Nikita, Klute, Michael, Awakowicz, Peter, Brinkmann, Ralf Peter, Heinrich, Wolfgang, "Correlated mode analysis of a microwave driven ICP source" in Plasma Sources Science and Technology, 28, no. 3 (2019):035013,
https://doi.org/10.1088/1361-6595/ab06a7 .,
https://hdl.handle.net/21.15107/rcub_dais_6956 .

TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
UR  - http://iopscience.iop.org/10.1088/1361-6595/aaefcc
UR  - https://dais.sanu.ac.rs/123456789/4640
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4640
ER  - 

@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4640"
}

Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P.. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4640

Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4640 .

Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf-Peter, Awakowicz, Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" in Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .,
https://hdl.handle.net/21.15107/rcub_dais_4640 .

TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
UR  - http://iopscience.iop.org/10.1088/1361-6595/aaefcc
UR  - https://dais.sanu.ac.rs/123456789/4827
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4827
ER  - 

@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4827"
}

Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P.. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4827

Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4827 .

Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf-Peter, Awakowicz, Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" in Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .,
https://hdl.handle.net/21.15107/rcub_dais_4827 .