TY  - JOUR
AU  - Klute, Michael
AU  - Kemaneci, Efe
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2021
UR  - https://dais.sanu.ac.rs/123456789/11799
AB  - The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
SP  - 065014
VL  - 30
IS  - 6
DO  - 10.1088/1361-6595/ac04bc
UR  - https://hdl.handle.net/21.15107/rcub_dais_11799
ER  - 

@article{
author = "Klute, Michael and Kemaneci, Efe and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2021",
abstract = "The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements",
pages = "065014",
volume = "30",
number = "6",
doi = "10.1088/1361-6595/ac04bc",
url = "https://hdl.handle.net/21.15107/rcub_dais_11799"
}

Klute, M., Kemaneci, E., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2021). Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology
IOP Publishing., 30(6), 065014.
https://doi.org/10.1088/1361-6595/ac04bc
https://hdl.handle.net/21.15107/rcub_dais_11799

Klute M, Kemaneci E, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology. 2021;30(6):065014.
doi:10.1088/1361-6595/ac04bc
https://hdl.handle.net/21.15107/rcub_dais_11799 .

Klute, Michael, Kemaneci, Efe, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements" in Plasma Sources Science and Technology, 30, no. 6 (2021):065014,
https://doi.org/10.1088/1361-6595/ac04bc .,
https://hdl.handle.net/21.15107/rcub_dais_11799 .