Stefanović, Ilija

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orcid::0000-0002-1652-1287
  • Stefanović, Ilija (10)
Projects

Author's Bibliography

Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model

Denysenko, I. B.; Stefanović, Ilija; Mikikian, M.; Kovačević, E.; Berndt, J.

(IOP Publishing, 2021)

TY  - JOUR
AU  - Denysenko, I. B.
AU  - Stefanović, Ilija
AU  - Mikikian, M.
AU  - Kovačević, E.
AU  - Berndt, J.
PY  - 2021
AB  - The properties (densities of electrons and metastable argon atoms, effective electron temperature and dust charge) of argon/dust and pure argon pulsed plasmas are studied using a spatially-averaged model. The calculated time-dependencies for the densities of electrons and metastable atoms are compared with the experimental measurements and are found to be in a good qualitative agreement. It is analyzed how the plasma properties depend on the shape of the electron energy probability function (EEPF), the pulsing frequency and the duty cycle for both dust-free and dusty plasma. The analysis reveals that the agreement between theory and experiment is better with Druyvesteyn EEPF than the Maxwellian EEPF. Further, the variation in the pulsing frequency νp differently affects the metastable density nm in a dust-free and in a dusty plasma. For large νp, the metastable density in the dust-free pulsed plasma is larger than in the continuous-wave (CW) discharge, while the opposite is obtained in the presence of dust particles. This difference probably arises because of faster variation in the effective electron temperature in the dusty plasma due to collection of electrons by dust particles. Our calculations also show that dust particles may affect the behavior of electron density in the beginning of the on-period due to an enhancement in electron collection by dust particles.
PB  - IOP Publishing
T2  - Journal of Physics D: Applied Physics
T1  - Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model
SP  - 065202
VL  - 54
IS  - 6
DO  - 10.1088/1361-6463/abc210
UR  - https://hdl.handle.net/21.15107/rcub_dais_9988
ER  - 
@article{
author = "Denysenko, I. B. and Stefanović, Ilija and Mikikian, M. and Kovačević, E. and Berndt, J.",
year = "2021",
abstract = "The properties (densities of electrons and metastable argon atoms, effective electron temperature and dust charge) of argon/dust and pure argon pulsed plasmas are studied using a spatially-averaged model. The calculated time-dependencies for the densities of electrons and metastable atoms are compared with the experimental measurements and are found to be in a good qualitative agreement. It is analyzed how the plasma properties depend on the shape of the electron energy probability function (EEPF), the pulsing frequency and the duty cycle for both dust-free and dusty plasma. The analysis reveals that the agreement between theory and experiment is better with Druyvesteyn EEPF than the Maxwellian EEPF. Further, the variation in the pulsing frequency νp differently affects the metastable density nm in a dust-free and in a dusty plasma. For large νp, the metastable density in the dust-free pulsed plasma is larger than in the continuous-wave (CW) discharge, while the opposite is obtained in the presence of dust particles. This difference probably arises because of faster variation in the effective electron temperature in the dusty plasma due to collection of electrons by dust particles. Our calculations also show that dust particles may affect the behavior of electron density in the beginning of the on-period due to an enhancement in electron collection by dust particles.",
publisher = "IOP Publishing",
journal = "Journal of Physics D: Applied Physics",
title = "Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model",
pages = "065202",
volume = "54",
number = "6",
doi = "10.1088/1361-6463/abc210",
url = "https://hdl.handle.net/21.15107/rcub_dais_9988"
}
Denysenko, I. B., Stefanović, I., Mikikian, M., Kovačević, E.,& Berndt, J. (2021). Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model.
Journal of Physics D: Applied Physics
IOP Publishing., 54(6), 065202.
https://doi.org/10.1088/1361-6463/abc210
Denysenko IB, Stefanović I, Mikikian M, Kovačević E, Berndt J. Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model. Journal of Physics D: Applied Physics. 2021;54(6):065202.
doi:10.1088/1361-6463/abc210.
Denysenko I. B., Stefanović Ilija, Mikikian M., Kovačević E., Berndt J., "Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model" Journal of Physics D: Applied Physics, 54, no. 6 (2021):065202,
https://doi.org/10.1088/1361-6463/abc210 .

Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model

Denysenko, I. B.; Stefanović, Ilija; Mikikian, M.; Kovačević, E.; Berndt, J.

(IOP Publishing, 2021)

TY  - JOUR
AU  - Denysenko, I. B.
AU  - Stefanović, Ilija
AU  - Mikikian, M.
AU  - Kovačević, E.
AU  - Berndt, J.
PY  - 2021
AB  - The properties (densities of electrons and metastable argon atoms, effective electron temperature and dust charge) of argon/dust and pure argon pulsed plasmas are studied using a spatially-averaged model. The calculated time-dependencies for the densities of electrons and metastable atoms are compared with the experimental measurements and are found to be in a good qualitative agreement. It is analyzed how the plasma properties depend on the shape of the electron energy probability function (EEPF), the pulsing frequency and the duty cycle for both dust-free and dusty plasma. The analysis reveals that the agreement between theory and experiment is better with Druyvesteyn EEPF than the Maxwellian EEPF. Further, the variation in the pulsing frequency νp differently affects the metastable density nm in a dust-free and in a dusty plasma. For large νp, the metastable density in the dust-free pulsed plasma is larger than in the continuous-wave (CW) discharge, while the opposite is obtained in the presence of dust particles. This difference probably arises because of faster variation in the effective electron temperature in the dusty plasma due to collection of electrons by dust particles. Our calculations also show that dust particles may affect the behavior of electron density in the beginning of the on-period due to an enhancement in electron collection by dust particles.
PB  - IOP Publishing
T2  - Journal of Physics D: Applied Physics
T1  - Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model
SP  - 065202
VL  - 54
IS  - 6
DO  - 10.1088/1361-6463/abc210
UR  - https://hdl.handle.net/21.15107/rcub_dais_11627
ER  - 
@article{
author = "Denysenko, I. B. and Stefanović, Ilija and Mikikian, M. and Kovačević, E. and Berndt, J.",
year = "2021",
abstract = "The properties (densities of electrons and metastable argon atoms, effective electron temperature and dust charge) of argon/dust and pure argon pulsed plasmas are studied using a spatially-averaged model. The calculated time-dependencies for the densities of electrons and metastable atoms are compared with the experimental measurements and are found to be in a good qualitative agreement. It is analyzed how the plasma properties depend on the shape of the electron energy probability function (EEPF), the pulsing frequency and the duty cycle for both dust-free and dusty plasma. The analysis reveals that the agreement between theory and experiment is better with Druyvesteyn EEPF than the Maxwellian EEPF. Further, the variation in the pulsing frequency νp differently affects the metastable density nm in a dust-free and in a dusty plasma. For large νp, the metastable density in the dust-free pulsed plasma is larger than in the continuous-wave (CW) discharge, while the opposite is obtained in the presence of dust particles. This difference probably arises because of faster variation in the effective electron temperature in the dusty plasma due to collection of electrons by dust particles. Our calculations also show that dust particles may affect the behavior of electron density in the beginning of the on-period due to an enhancement in electron collection by dust particles.",
publisher = "IOP Publishing",
journal = "Journal of Physics D: Applied Physics",
title = "Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model",
pages = "065202",
volume = "54",
number = "6",
doi = "10.1088/1361-6463/abc210",
url = "https://hdl.handle.net/21.15107/rcub_dais_11627"
}
Denysenko, I. B., Stefanović, I., Mikikian, M., Kovačević, E.,& Berndt, J. (2021). Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model.
Journal of Physics D: Applied Physics
IOP Publishing., 54(6), 065202.
https://doi.org/10.1088/1361-6463/abc210
Denysenko IB, Stefanović I, Mikikian M, Kovačević E, Berndt J. Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model. Journal of Physics D: Applied Physics. 2021;54(6):065202.
doi:10.1088/1361-6463/abc210.
Denysenko I. B., Stefanović Ilija, Mikikian M., Kovačević E., Berndt J., "Argon/dust and pure argon pulsed plasmas explored using a spatially-averaged model" Journal of Physics D: Applied Physics, 54, no. 6 (2021):065202,
https://doi.org/10.1088/1361-6463/abc210 .

Theoretical investigation of a miniature microwave driven plasma jet

Klute, Michael; Porteanu, Horia-Eugen; Stefanović, Ilija; Heinrich, Wolfgang; Awakowicz, Peter; Brinkmann, Ralf Peter

(IOP Publishing, 2020)

TY  - JOUR
AU  - Klute, Michael
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2020
AB  - Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Theoretical investigation of a miniature microwave driven plasma jet
SP  - 065018
VL  - 29
IS  - 6
DO  - 10.1088/1361-6595/ab9483
UR  - https://hdl.handle.net/21.15107/rcub_dais_9987
ER  - 
@article{
author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2020",
abstract = "Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Theoretical investigation of a miniature microwave driven plasma jet",
pages = "065018",
volume = "29",
number = "6",
doi = "10.1088/1361-6595/ab9483",
url = "https://hdl.handle.net/21.15107/rcub_dais_9987"
}
Klute, M., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P. (2020). Theoretical investigation of a miniature microwave driven plasma jet.
Plasma Sources Science and Technology
IOP Publishing., 29(6), 065018.
https://doi.org/10.1088/1361-6595/ab9483
Klute M, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Theoretical investigation of a miniature microwave driven plasma jet. Plasma Sources Science and Technology. 2020;29(6):065018.
doi:10.1088/1361-6595/ab9483.
Klute Michael, Porteanu Horia-Eugen, Stefanović Ilija, Heinrich Wolfgang, Awakowicz Peter, Brinkmann Ralf Peter, "Theoretical investigation of a miniature microwave driven plasma jet" Plasma Sources Science and Technology, 29, no. 6 (2020):065018,
https://doi.org/10.1088/1361-6595/ab9483 .
1
1

Correlated mode analysis of a microwave driven ICP source

Porteanu, Horia-Eugen; Stefanović, Ilija; Bibinov, Nikita; Klute, Michael; Awakowicz, Peter; Brinkmann, Ralf Peter; Heinrich, Wolfgang

(IOP Publishing, 2019)

TY  - JOUR
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Klute, Michael
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
AU  - Heinrich, Wolfgang
PY  - 2019
AB  - Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Correlated mode analysis of a microwave driven ICP source
SP  - 035013
VL  - 28
IS  - 3
DO  - 10.1088/1361-6595/ab06a7
UR  - https://hdl.handle.net/21.15107/rcub_dais_6956
ER  - 
@article{
author = "Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Klute, Michael and Awakowicz, Peter and Brinkmann, Ralf Peter and Heinrich, Wolfgang",
year = "2019",
abstract = "Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Correlated mode analysis of a microwave driven ICP source",
pages = "035013",
volume = "28",
number = "3",
doi = "10.1088/1361-6595/ab06a7",
url = "https://hdl.handle.net/21.15107/rcub_dais_6956"
}
Porteanu, H., Stefanović, I., Bibinov, N., Klute, M., Awakowicz, P., Brinkmann, R. P.,& Heinrich, W. (2019). Correlated mode analysis of a microwave driven ICP source.
Plasma Sources Science and Technology
IOP Publishing., 28(3), 035013.
https://doi.org/10.1088/1361-6595/ab06a7
Porteanu H, Stefanović I, Bibinov N, Klute M, Awakowicz P, Brinkmann RP, Heinrich W. Correlated mode analysis of a microwave driven ICP source. Plasma Sources Science and Technology. 2019;28(3):035013.
doi:10.1088/1361-6595/ab06a7.
Porteanu Horia-Eugen, Stefanović Ilija, Bibinov Nikita, Klute Michael, Awakowicz Peter, Brinkmann Ralf Peter, Heinrich Wolfgang, "Correlated mode analysis of a microwave driven ICP source" Plasma Sources Science and Technology, 28, no. 3 (2019):035013,
https://doi.org/10.1088/1361-6595/ab06a7 .
6
4
6

Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices

Porteanu, Horia-Eugen; Stefanović, Ilija; Bibinov, Nikita; Klute, Michael; Awakowicz, Peter; Brinkmann, Ralf Peter; Heinrich, Wolfgang

(IEEE, 2019)

TY  - CONF
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Klute, Michael
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
AU  - Heinrich, Wolfgang
PY  - 2019
AB  - Inductively coupled plasma (ICP) sources are preferred to the capacitive (CCP) sources because of their higher electron density and plasma purity. The use of microwaves for the plasma excitation allows not only to obtain a dense plasma with a low gas temperature but also to generate such a plasma at higher pressures. We present a miniaturized device capable of working up to atmospheric pressure. The plasma is generated in a quartz tube with an outer diameter of 7 – 12 mm. The microwave plasma interaction has been studied using an original method, the “Hot-S-Parameter” spectroscopy, presented in detail in [1]. The variation of the resonance frequency and generally of the reflected power as a function of frequency provides information about the type of coupling and about the plasma conductivity, i.e., electron density and scattering frequency. The microwave data are correlated with photographs of the plasma shape and with results of the optical emission spectroscopy (OES) of nitrogen [2]. At 1000 Pa, and 80 W at 2.45 GHz, a nitrogen plasma reaches an electron density of 3 1019 m−3 and a gas temperature of 1600 K [2]. The miniaturized source includes an impedance matching circuit. Based on microwave and optical measurements we estimate the power absorbed by the plasma at 1000 Pa to be about 60 % of the incident power. This efficiency is much higher than in standard reactors driven at 13.56 MHz. The source has been successfully tested with argon at atmospheric pressure. This fact opens new perspectives for the use as an array of remote plasma sources for thin-film depositions.
PB  - IEEE
C3  - 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
T1  - Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
UR  - https://hdl.handle.net/21.15107/rcub_dais_6957
ER  - 
@conference{
author = "Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Klute, Michael and Awakowicz, Peter and Brinkmann, Ralf Peter and Heinrich, Wolfgang",
year = "2019",
abstract = "Inductively coupled plasma (ICP) sources are preferred to the capacitive (CCP) sources because of their higher electron density and plasma purity. The use of microwaves for the plasma excitation allows not only to obtain a dense plasma with a low gas temperature but also to generate such a plasma at higher pressures. We present a miniaturized device capable of working up to atmospheric pressure. The plasma is generated in a quartz tube with an outer diameter of 7 – 12 mm. The microwave plasma interaction has been studied using an original method, the “Hot-S-Parameter” spectroscopy, presented in detail in [1]. The variation of the resonance frequency and generally of the reflected power as a function of frequency provides information about the type of coupling and about the plasma conductivity, i.e., electron density and scattering frequency. The microwave data are correlated with photographs of the plasma shape and with results of the optical emission spectroscopy (OES) of nitrogen [2]. At 1000 Pa, and 80 W at 2.45 GHz, a nitrogen plasma reaches an electron density of 3 1019 m−3 and a gas temperature of 1600 K [2]. The miniaturized source includes an impedance matching circuit. Based on microwave and optical measurements we estimate the power absorbed by the plasma at 1000 Pa to be about 60 % of the incident power. This efficiency is much higher than in standard reactors driven at 13.56 MHz. The source has been successfully tested with argon at atmospheric pressure. This fact opens new perspectives for the use as an array of remote plasma sources for thin-film depositions.",
publisher = "IEEE",
journal = "2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida",
title = "Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices",
url = "https://hdl.handle.net/21.15107/rcub_dais_6957"
}
Porteanu, H., Stefanović, I., Bibinov, N., Klute, M., Awakowicz, P., Brinkmann, R. P.,& Heinrich, W. (2019). Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices.
2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
IEEE..
Porteanu H, Stefanović I, Bibinov N, Klute M, Awakowicz P, Brinkmann RP, Heinrich W. Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices. 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida. 2019;.
Porteanu Horia-Eugen, Stefanović Ilija, Bibinov Nikita, Klute Michael, Awakowicz Peter, Brinkmann Ralf Peter, Heinrich Wolfgang, "Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices" 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida (2019)

Theoretical investigation of a novel microwave driven ICP plasma jet

Klute, Michael; Porteanu, Horia-Eugen; Stefanović, Ilija; Bibinov, Nikita; Heinrich, Wolfgang; Awakowicz, Peter; Brinkmann, Ralf Peter

(IEEE, 2019)

TY  - CONF
AU  - Klute, Michael
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2019
AB  - Theoretical investigation of a novel microwave driven ICP plasma jet
 26 Jun 2019, 16:15
 15m
 Gold Coast III/IV (Double Tree at the Entrance to Universal Orlando)
Oral  2.7 Microwave Plasma Interaction 2.7 Microwave Plasma Interaction III
Speaker
Mr Michael Klute (Ruhr University)
Description
Microwave and radio frequency driven plasmas-jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. This mode, however, couples considerable power to ions which limits the plasma density and the efficiency and gives rise to negative side effects such as erosion. The inductive coupling, known as H-mode, eliminates these disadvantages and is attractive for large scale plasmas. A novel small scale, microwave driven plasma-jet has been proposed by \textit{Porteanu et al.}[1]. It is operated as an inductive discharge and that has been recently characterized using optical emission spectroscopy (OES) by \textit{Stefanovic et al.}[2]. In this work the proposed plasma-jet is examined theoretically. A global model of the new device is presented based on the volume-integrated balances of particle number and electron density, and a series representation of the electromagnetic field in the resonator. An infinite number of modes can be found ordered by the azimuthal wave number m. The mode m=0 can be identified with the inductive mode and will be called H-mode, the mode m=1 is the capacitive mode and will be called E-mode. By equating the electromagnetic power that is absorbed by the plasma with the loss power, stable operating points and hysteresis effects can be investigated. In a second step the spatially resolved electromagnetic field strength will be considered. All results will be compared to the results of the OES measurements and imagines obtained from CCD-imaging.

[1]Porteanu et al.\textit{Plasma Sources Sci.Technol.}\textbf{22}, 035016 (2013)
[2] Stefanovic et al.\textit{Plasma Sources Sci.Technol.}\textbf{27}, 12LT01 (2018)
[3] Porteanu et al.\textit{Plasma Sources Sci.Technol.} accepted (2019)
PB  - IEEE
C3  - 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
T1  - Theoretical investigation of a novel microwave driven ICP plasma jet
UR  - https://hdl.handle.net/21.15107/rcub_dais_6959
ER  - 
@conference{
author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2019",
abstract = "Theoretical investigation of a novel microwave driven ICP plasma jet
 26 Jun 2019, 16:15
 15m
 Gold Coast III/IV (Double Tree at the Entrance to Universal Orlando)
Oral  2.7 Microwave Plasma Interaction 2.7 Microwave Plasma Interaction III
Speaker
Mr Michael Klute (Ruhr University)
Description
Microwave and radio frequency driven plasmas-jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. This mode, however, couples considerable power to ions which limits the plasma density and the efficiency and gives rise to negative side effects such as erosion. The inductive coupling, known as H-mode, eliminates these disadvantages and is attractive for large scale plasmas. A novel small scale, microwave driven plasma-jet has been proposed by \textit{Porteanu et al.}[1]. It is operated as an inductive discharge and that has been recently characterized using optical emission spectroscopy (OES) by \textit{Stefanovic et al.}[2]. In this work the proposed plasma-jet is examined theoretically. A global model of the new device is presented based on the volume-integrated balances of particle number and electron density, and a series representation of the electromagnetic field in the resonator. An infinite number of modes can be found ordered by the azimuthal wave number m. The mode m=0 can be identified with the inductive mode and will be called H-mode, the mode m=1 is the capacitive mode and will be called E-mode. By equating the electromagnetic power that is absorbed by the plasma with the loss power, stable operating points and hysteresis effects can be investigated. In a second step the spatially resolved electromagnetic field strength will be considered. All results will be compared to the results of the OES measurements and imagines obtained from CCD-imaging.

[1]Porteanu et al.\textit{Plasma Sources Sci.Technol.}\textbf{22}, 035016 (2013)
[2] Stefanovic et al.\textit{Plasma Sources Sci.Technol.}\textbf{27}, 12LT01 (2018)
[3] Porteanu et al.\textit{Plasma Sources Sci.Technol.} accepted (2019)",
publisher = "IEEE",
journal = "2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida",
title = "Theoretical investigation of a novel microwave driven ICP plasma jet",
url = "https://hdl.handle.net/21.15107/rcub_dais_6959"
}
Klute, M., Porteanu, H., Stefanović, I., Bibinov, N., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P. (2019). Theoretical investigation of a novel microwave driven ICP plasma jet.
2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
IEEE..
Klute M, Porteanu H, Stefanović I, Bibinov N, Heinrich W, Awakowicz P, Brinkmann RP. Theoretical investigation of a novel microwave driven ICP plasma jet. 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida. 2019;.
Klute Michael, Porteanu Horia-Eugen, Stefanović Ilija, Bibinov Nikita, Heinrich Wolfgang, Awakowicz Peter, Brinkmann Ralf Peter, "Theoretical investigation of a novel microwave driven ICP plasma jet" 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida (2019)

Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source

Stefanović, Ilija; Klute, Michael; Brinkmann, Ralf Peter; Bibinov, Nikita; Heinrich, Wolfgang; Porteanu, Horia-Eugen; Awakowicz, Peter

(IEEE, 2019)

TY  - CONF
AU  - Stefanović, Ilija
AU  - Klute, Michael
AU  - Brinkmann, Ralf Peter
AU  - Bibinov, Nikita
AU  - Heinrich, Wolfgang
AU  - Porteanu, Horia-Eugen
AU  - Awakowicz, Peter
PY  - 2019
AB  - Miniature Microwave Inductively Coupled Plasma (MMWICP) source is a novel and versatile non-thermal plasma source, which profit of high electron density and high power efficiency. In its compact version a single MMWICP source comprises a quartz tube of 5 mm inner diameter enclosed by a copper resonator of 8 mm thickness. This basic unit can be combined in an array of two (double), four (Quadriga) or more sources. Here, the single source is characterized by Optical Emission Spectroscopy (OES). A continuous stream of nitrogen gas is running through the glass cylinder at a pressure of 2000 Pa. This specific pressure is chosen to satisfy the Local Field Approximation (LFA), which is used in the latter data analysis. For the OES measurements nitrogen as a test gas is selected for its well-known population kinetics. In particularly, the second positive system of neutral nitrogen (380 nm line) and first positive system of nitrogen molecular ion (391 nm) are monitored, for which the population kinetics can be described by a simple collision radiative model. The OES measuring unit consists of a macro objective, CCD camera and two narrow band-pass filters, which isolate the corresponding emission lines. With previously absolutely calibrated OES unit, the radially resolved absolute line intensities are collected with a 28 micrometer resolution. Simultaneously, an absolutely calibrated high resolution Echelle spectrometer monitors the rotational lines distribution form respective emissions. Using the rate equations of collision-radiative model and BOLSIG+ for solving a Boltzmann equation under the assumption of LFA, it is possible to measure the spatially resolved electron density and electric field. Moreover, the spatially resolved deposited power density is calculated. In the presentation we will discussed the power dissipation in CCP, ICP and hybrid mode of operation. In respect to power efficiency MMWICP will be compared to other microwave plasma sources.
PB  - IEEE
C3  - 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
T1  - Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source
UR  - https://hdl.handle.net/21.15107/rcub_dais_6958
ER  - 
@conference{
author = "Stefanović, Ilija and Klute, Michael and Brinkmann, Ralf Peter and Bibinov, Nikita and Heinrich, Wolfgang and Porteanu, Horia-Eugen and Awakowicz, Peter",
year = "2019",
abstract = "Miniature Microwave Inductively Coupled Plasma (MMWICP) source is a novel and versatile non-thermal plasma source, which profit of high electron density and high power efficiency. In its compact version a single MMWICP source comprises a quartz tube of 5 mm inner diameter enclosed by a copper resonator of 8 mm thickness. This basic unit can be combined in an array of two (double), four (Quadriga) or more sources. Here, the single source is characterized by Optical Emission Spectroscopy (OES). A continuous stream of nitrogen gas is running through the glass cylinder at a pressure of 2000 Pa. This specific pressure is chosen to satisfy the Local Field Approximation (LFA), which is used in the latter data analysis. For the OES measurements nitrogen as a test gas is selected for its well-known population kinetics. In particularly, the second positive system of neutral nitrogen (380 nm line) and first positive system of nitrogen molecular ion (391 nm) are monitored, for which the population kinetics can be described by a simple collision radiative model. The OES measuring unit consists of a macro objective, CCD camera and two narrow band-pass filters, which isolate the corresponding emission lines. With previously absolutely calibrated OES unit, the radially resolved absolute line intensities are collected with a 28 micrometer resolution. Simultaneously, an absolutely calibrated high resolution Echelle spectrometer monitors the rotational lines distribution form respective emissions. Using the rate equations of collision-radiative model and BOLSIG+ for solving a Boltzmann equation under the assumption of LFA, it is possible to measure the spatially resolved electron density and electric field. Moreover, the spatially resolved deposited power density is calculated. In the presentation we will discussed the power dissipation in CCP, ICP and hybrid mode of operation. In respect to power efficiency MMWICP will be compared to other microwave plasma sources.",
publisher = "IEEE",
journal = "2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida",
title = "Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source",
url = "https://hdl.handle.net/21.15107/rcub_dais_6958"
}
Stefanović, I., Klute, M., Brinkmann, R. P., Bibinov, N., Heinrich, W., Porteanu, H.,& Awakowicz, P. (2019). Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source.
2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
IEEE..
Stefanović I, Klute M, Brinkmann RP, Bibinov N, Heinrich W, Porteanu H, Awakowicz P. Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source. 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida. 2019;.
Stefanović Ilija, Klute Michael, Brinkmann Ralf Peter, Bibinov Nikita, Heinrich Wolfgang, Porteanu Horia-Eugen, Awakowicz Peter, "Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source" 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida (2019)

New and versatile minature microwave plasma source

Stefanović, Ilija; Bibinov, Nikita; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf Peter; Awakowicz, Peter

(Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, 2019)

TY  - CONF
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf Peter
AU  - Awakowicz, Peter
PY  - 2019
AB  - Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.
PB  - Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava
PB  - Bratislava : ociety for Plasma Research and Applications
C3  - Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019
T1  - New and versatile minature microwave plasma source
UR  - https://hdl.handle.net/21.15107/rcub_dais_6996
ER  - 
@conference{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf Peter and Awakowicz, Peter",
year = "2019",
abstract = "Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.",
publisher = "Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Bratislava : ociety for Plasma Research and Applications",
journal = "Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019",
title = "New and versatile minature microwave plasma source",
url = "https://hdl.handle.net/21.15107/rcub_dais_6996"
}
Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R. P.,& Awakowicz, P. (2019). New and versatile minature microwave plasma source.
Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019
Bratislava : ociety for Plasma Research and Applications..
Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann RP, Awakowicz P. New and versatile minature microwave plasma source. Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019. 2019;.
Stefanović Ilija, Bibinov Nikita, Porteanu Horia-Eugen, Klute Michael, Brinkmann Ralf Peter, Awakowicz Peter, "New and versatile minature microwave plasma source" Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019 (2019)

Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow

Stefanović, Ilija; Bibinov, Nikita; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf-Peter; Awakowicz, Peter

(IOP Publishing, 2018)

TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4827
ER  - 
@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4827"
}
Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow.
Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc.
Stefanović Ilija, Bibinov Nikita, Porteanu Horia-Eugen, Klute Michael, Brinkmann Ralf-Peter, Awakowicz Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .
8
6
8

Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow

Stefanović, Ilija; Bibinov, Nikita; Porteanu, Horia-Eugen; Klute, Michael; Brinkmann, Ralf-Peter; Awakowicz, Peter

(IOP Publishing, 2018)

TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4640
ER  - 
@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4640"
}
Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow.
Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc.
Stefanović Ilija, Bibinov Nikita, Porteanu Horia-Eugen, Klute Michael, Brinkmann Ralf-Peter, Awakowicz Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .
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