TY  - JOUR
AU  - Klute, Michael
AU  - Kemaneci, Efe
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2021
UR  - https://dais.sanu.ac.rs/123456789/11799
AB  - The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
SP  - 065014
VL  - 30
IS  - 6
DO  - 10.1088/1361-6595/ac04bc
UR  - https://hdl.handle.net/21.15107/rcub_dais_11799
ER  - 

@article{
author = "Klute, Michael and Kemaneci, Efe and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2021",
abstract = "The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements",
pages = "065014",
volume = "30",
number = "6",
doi = "10.1088/1361-6595/ac04bc",
url = "https://hdl.handle.net/21.15107/rcub_dais_11799"
}

Klute, M., Kemaneci, E., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2021). Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology
IOP Publishing., 30(6), 065014.
https://doi.org/10.1088/1361-6595/ac04bc
https://hdl.handle.net/21.15107/rcub_dais_11799

Klute M, Kemaneci E, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology. 2021;30(6):065014.
doi:10.1088/1361-6595/ac04bc
https://hdl.handle.net/21.15107/rcub_dais_11799 .

Klute, Michael, Kemaneci, Efe, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements" in Plasma Sources Science and Technology, 30, no. 6 (2021):065014,
https://doi.org/10.1088/1361-6595/ac04bc .,
https://hdl.handle.net/21.15107/rcub_dais_11799 .

TY  - CONF
AU  - Klute, Michael
AU  - Kemaneci, Efe
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf-Peter
PY  - 2021
UR  - https://meetings.aps.org/Meeting/GEC21/Session/SR54.7
UR  - https://dais.sanu.ac.rs/123456789/12386
AB  - Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP)  is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power  absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental measurements.
PB  - Americam Physical Society
C3  - Bulletin of the American Physical Society
T1  - 3-dimensional semi-analytic model of a microwave driven miniature plasma jet
SP  - SR54.00007
VL  - 66
IS  - 7
UR  - https://hdl.handle.net/21.15107/rcub_dais_12386
ER  - 

@conference{
author = "Klute, Michael and Kemaneci, Efe and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf-Peter",
year = "2021",
abstract = "Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP)  is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power  absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental measurements.",
publisher = "Americam Physical Society",
journal = "Bulletin of the American Physical Society",
title = "3-dimensional semi-analytic model of a microwave driven miniature plasma jet",
pages = "SR54.00007",
volume = "66",
number = "7",
url = "https://hdl.handle.net/21.15107/rcub_dais_12386"
}

Klute, M., Kemaneci, E., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R.. (2021). 3-dimensional semi-analytic model of a microwave driven miniature plasma jet. in Bulletin of the American Physical Society
Americam Physical Society., 66(7), SR54.00007.
https://hdl.handle.net/21.15107/rcub_dais_12386

Klute M, Kemaneci E, Stefanović I, Heinrich W, Awakowicz P, Brinkmann R. 3-dimensional semi-analytic model of a microwave driven miniature plasma jet. in Bulletin of the American Physical Society. 2021;66(7):SR54.00007.
https://hdl.handle.net/21.15107/rcub_dais_12386 .

Klute, Michael, Kemaneci, Efe, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf-Peter, "3-dimensional semi-analytic model of a microwave driven miniature plasma jet" in Bulletin of the American Physical Society, 66, no. 7 (2021):SR54.00007,
https://hdl.handle.net/21.15107/rcub_dais_12386 .