TY  - JOUR
AU  - Klute, Michael
AU  - Kemaneci, Efe
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2021
UR  - https://dais.sanu.ac.rs/123456789/11799
AB  - The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
SP  - 065014
VL  - 30
IS  - 6
DO  - 10.1088/1361-6595/ac04bc
UR  - https://hdl.handle.net/21.15107/rcub_dais_11799
ER  - 

@article{
author = "Klute, Michael and Kemaneci, Efe and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2021",
abstract = "The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements",
pages = "065014",
volume = "30",
number = "6",
doi = "10.1088/1361-6595/ac04bc",
url = "https://hdl.handle.net/21.15107/rcub_dais_11799"
}

Klute, M., Kemaneci, E., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2021). Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology
IOP Publishing., 30(6), 065014.
https://doi.org/10.1088/1361-6595/ac04bc
https://hdl.handle.net/21.15107/rcub_dais_11799

Klute M, Kemaneci E, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology. 2021;30(6):065014.
doi:10.1088/1361-6595/ac04bc
https://hdl.handle.net/21.15107/rcub_dais_11799 .

Klute, Michael, Kemaneci, Efe, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements" in Plasma Sources Science and Technology, 30, no. 6 (2021):065014,
https://doi.org/10.1088/1361-6595/ac04bc .,
https://hdl.handle.net/21.15107/rcub_dais_11799 .

TY  - CONF
AU  - Klute, Michael
AU  - Kemaneci, Efe
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf-Peter
PY  - 2021
UR  - https://meetings.aps.org/Meeting/GEC21/Session/SR54.7
UR  - https://dais.sanu.ac.rs/123456789/12386
AB  - Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP)  is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power  absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental measurements.
PB  - Americam Physical Society
C3  - Bulletin of the American Physical Society
T1  - 3-dimensional semi-analytic model of a microwave driven miniature plasma jet
SP  - SR54.00007
VL  - 66
IS  - 7
UR  - https://hdl.handle.net/21.15107/rcub_dais_12386
ER  - 

@conference{
author = "Klute, Michael and Kemaneci, Efe and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf-Peter",
year = "2021",
abstract = "Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MiniatureMicroWaveICP (MMWICP)  is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al in Plasma Sources Sci. Technol. 29 065018 (2020). An analytic solution is found by expanding the expression of the electron density into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power  absorbed by the plasma. The results show that the spatial distribution of the electron density is highly depended on the absorbed power. The results are found to be in good agreement with experimental measurements.",
publisher = "Americam Physical Society",
journal = "Bulletin of the American Physical Society",
title = "3-dimensional semi-analytic model of a microwave driven miniature plasma jet",
pages = "SR54.00007",
volume = "66",
number = "7",
url = "https://hdl.handle.net/21.15107/rcub_dais_12386"
}

Klute, M., Kemaneci, E., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R.. (2021). 3-dimensional semi-analytic model of a microwave driven miniature plasma jet. in Bulletin of the American Physical Society
Americam Physical Society., 66(7), SR54.00007.
https://hdl.handle.net/21.15107/rcub_dais_12386

Klute M, Kemaneci E, Stefanović I, Heinrich W, Awakowicz P, Brinkmann R. 3-dimensional semi-analytic model of a microwave driven miniature plasma jet. in Bulletin of the American Physical Society. 2021;66(7):SR54.00007.
https://hdl.handle.net/21.15107/rcub_dais_12386 .

Klute, Michael, Kemaneci, Efe, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf-Peter, "3-dimensional semi-analytic model of a microwave driven miniature plasma jet" in Bulletin of the American Physical Society, 66, no. 7 (2021):SR54.00007,
https://hdl.handle.net/21.15107/rcub_dais_12386 .

TY  - JOUR
AU  - Klute, Michael
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2020
UR  - https://dais.sanu.ac.rs/123456789/9987
AB  - Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Theoretical investigation of a miniature microwave driven plasma jet
SP  - 065018
VL  - 29
IS  - 6
DO  - 10.1088/1361-6595/ab9483
UR  - https://hdl.handle.net/21.15107/rcub_dais_9987
ER  - 

@article{
author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2020",
abstract = "Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ≥ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Theoretical investigation of a miniature microwave driven plasma jet",
pages = "065018",
volume = "29",
number = "6",
doi = "10.1088/1361-6595/ab9483",
url = "https://hdl.handle.net/21.15107/rcub_dais_9987"
}

Klute, M., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2020). Theoretical investigation of a miniature microwave driven plasma jet. in Plasma Sources Science and Technology
IOP Publishing., 29(6), 065018.
https://doi.org/10.1088/1361-6595/ab9483
https://hdl.handle.net/21.15107/rcub_dais_9987

Klute M, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Theoretical investigation of a miniature microwave driven plasma jet. in Plasma Sources Science and Technology. 2020;29(6):065018.
doi:10.1088/1361-6595/ab9483
https://hdl.handle.net/21.15107/rcub_dais_9987 .

Klute, Michael, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Theoretical investigation of a miniature microwave driven plasma jet" in Plasma Sources Science and Technology, 29, no. 6 (2020):065018,
https://doi.org/10.1088/1361-6595/ab9483 .,
https://hdl.handle.net/21.15107/rcub_dais_9987 .

TY  - JOUR
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Klute, Michael
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
AU  - Heinrich, Wolfgang
PY  - 2019
UR  - https://dais.sanu.ac.rs/123456789/6956
AB  - Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Correlated mode analysis of a microwave driven ICP source
SP  - 035013
VL  - 28
IS  - 3
DO  - 10.1088/1361-6595/ab06a7
UR  - https://hdl.handle.net/21.15107/rcub_dais_6956
ER  - 

@article{
author = "Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Klute, Michael and Awakowicz, Peter and Brinkmann, Ralf Peter and Heinrich, Wolfgang",
year = "2019",
abstract = "Microwave and optical measurements are correlated to identify the mode evolution in a miniature, microwave driven, inductively coupled plasma (ICP) source. The very compact design of the source is derived from previous work (Porteanu et al 2013 Plasma Sources Sci. Technol. 22 035016). Microwave spectroscopy of the system resonances during the simultaneous microwave excitation of the plasma (‘Hot-S-Parameter’ spectroscopy) is a novel method to determine the electron density and to identify the type of coupling mode. The method corresponds directly to the kind of numerical simulations employed. The purpose of this analysis is finally to find the minimum power necessary to drive the source into the ICP mode. The efficiency of microwave energy transfer to the plasma is also discussed. Nitrogen at pressures between 50 and 1000 Pa and a gas flow of 150 sccm is used as test plasma, for which the electron density is determined. Analysis of the microwave resonance frequency shows that the electron density exceeds 1019 m−3 at 50 Pa for 11 W and at 1000 Pa for 26 W absorbed power. 3D theoretical analysis of this source confirms that at this electron density an ICP mode is present.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Correlated mode analysis of a microwave driven ICP source",
pages = "035013",
volume = "28",
number = "3",
doi = "10.1088/1361-6595/ab06a7",
url = "https://hdl.handle.net/21.15107/rcub_dais_6956"
}

Porteanu, H., Stefanović, I., Bibinov, N., Klute, M., Awakowicz, P., Brinkmann, R. P.,& Heinrich, W.. (2019). Correlated mode analysis of a microwave driven ICP source. in Plasma Sources Science and Technology
IOP Publishing., 28(3), 035013.
https://doi.org/10.1088/1361-6595/ab06a7
https://hdl.handle.net/21.15107/rcub_dais_6956

Porteanu H, Stefanović I, Bibinov N, Klute M, Awakowicz P, Brinkmann RP, Heinrich W. Correlated mode analysis of a microwave driven ICP source. in Plasma Sources Science and Technology. 2019;28(3):035013.
doi:10.1088/1361-6595/ab06a7
https://hdl.handle.net/21.15107/rcub_dais_6956 .

Porteanu, Horia-Eugen, Stefanović, Ilija, Bibinov, Nikita, Klute, Michael, Awakowicz, Peter, Brinkmann, Ralf Peter, Heinrich, Wolfgang, "Correlated mode analysis of a microwave driven ICP source" in Plasma Sources Science and Technology, 28, no. 3 (2019):035013,
https://doi.org/10.1088/1361-6595/ab06a7 .,
https://hdl.handle.net/21.15107/rcub_dais_6956 .

TY  - CONF
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Klute, Michael
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
AU  - Heinrich, Wolfgang
PY  - 2019
UR  - https://indico.cern.ch/event/727938/contributions/3339169/
UR  - https://dais.sanu.ac.rs/123456789/6957
AB  - Inductively coupled plasma (ICP) sources are preferred to the capacitive (CCP) sources because of their higher electron density and plasma purity. The use of microwaves for the plasma excitation allows not only to obtain a dense plasma with a low gas temperature but also to generate such a plasma at higher pressures. We present a miniaturized device capable of working up to atmospheric pressure. The plasma is generated in a quartz tube with an outer diameter of 7 – 12 mm. The microwave plasma interaction has been studied using an original method, the “Hot-S-Parameter” spectroscopy, presented in detail in [1]. The variation of the resonance frequency and generally of the reflected power as a function of frequency provides information about the type of coupling and about the plasma conductivity, i.e., electron density and scattering frequency. The microwave data are correlated with photographs of the plasma shape and with results of the optical emission spectroscopy (OES) of nitrogen [2]. At 1000 Pa, and 80 W at 2.45 GHz, a nitrogen plasma reaches an electron density of 3 1019 m−3 and a gas temperature of 1600 K [2]. The miniaturized source includes an impedance matching circuit. Based on microwave and optical measurements we estimate the power absorbed by the plasma at 1000 Pa to be about 60 % of the incident power. This efficiency is much higher than in standard reactors driven at 13.56 MHz. The source has been successfully tested with argon at atmospheric pressure. This fact opens new perspectives for the use as an array of remote plasma sources for thin-film depositions.
PB  - IEEE
C3  - 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
T1  - Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
UR  - https://hdl.handle.net/21.15107/rcub_dais_6957
ER  - 

@conference{
author = "Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Klute, Michael and Awakowicz, Peter and Brinkmann, Ralf Peter and Heinrich, Wolfgang",
year = "2019",
abstract = "Inductively coupled plasma (ICP) sources are preferred to the capacitive (CCP) sources because of their higher electron density and plasma purity. The use of microwaves for the plasma excitation allows not only to obtain a dense plasma with a low gas temperature but also to generate such a plasma at higher pressures. We present a miniaturized device capable of working up to atmospheric pressure. The plasma is generated in a quartz tube with an outer diameter of 7 – 12 mm. The microwave plasma interaction has been studied using an original method, the “Hot-S-Parameter” spectroscopy, presented in detail in [1]. The variation of the resonance frequency and generally of the reflected power as a function of frequency provides information about the type of coupling and about the plasma conductivity, i.e., electron density and scattering frequency. The microwave data are correlated with photographs of the plasma shape and with results of the optical emission spectroscopy (OES) of nitrogen [2]. At 1000 Pa, and 80 W at 2.45 GHz, a nitrogen plasma reaches an electron density of 3 1019 m−3 and a gas temperature of 1600 K [2]. The miniaturized source includes an impedance matching circuit. Based on microwave and optical measurements we estimate the power absorbed by the plasma at 1000 Pa to be about 60 % of the incident power. This efficiency is much higher than in standard reactors driven at 13.56 MHz. The source has been successfully tested with argon at atmospheric pressure. This fact opens new perspectives for the use as an array of remote plasma sources for thin-film depositions.",
publisher = "IEEE",
journal = "2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida",
title = "Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices",
url = "https://hdl.handle.net/21.15107/rcub_dais_6957"
}

Porteanu, H., Stefanović, I., Bibinov, N., Klute, M., Awakowicz, P., Brinkmann, R. P.,& Heinrich, W.. (2019). Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices. in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
IEEE..
https://hdl.handle.net/21.15107/rcub_dais_6957

Porteanu H, Stefanović I, Bibinov N, Klute M, Awakowicz P, Brinkmann RP, Heinrich W. Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices. in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida. 2019;.
https://hdl.handle.net/21.15107/rcub_dais_6957 .

Porteanu, Horia-Eugen, Stefanović, Ilija, Bibinov, Nikita, Klute, Michael, Awakowicz, Peter, Brinkmann, Ralf Peter, Heinrich, Wolfgang, "Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices" in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida (2019),
https://hdl.handle.net/21.15107/rcub_dais_6957 .

TY  - CONF
AU  - Klute, Michael
AU  - Porteanu, Horia-Eugen
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Heinrich, Wolfgang
AU  - Awakowicz, Peter
AU  - Brinkmann, Ralf Peter
PY  - 2019
UR  - https://indico.cern.ch/event/727938/contributions/3339171/
UR  - https://dais.sanu.ac.rs/123456789/6959
AB  - Theoretical investigation of a novel microwave driven ICP plasma jet
 26 Jun 2019, 16:15
 15m
 Gold Coast III/IV (Double Tree at the Entrance to Universal Orlando)
Oral  2.7 Microwave Plasma Interaction 2.7 Microwave Plasma Interaction III
Speaker
Mr Michael Klute (Ruhr University)
Description
Microwave and radio frequency driven plasmas-jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. This mode, however, couples considerable power to ions which limits the plasma density and the efficiency and gives rise to negative side effects such as erosion. The inductive coupling, known as H-mode, eliminates these disadvantages and is attractive for large scale plasmas. A novel small scale, microwave driven plasma-jet has been proposed by \textit{Porteanu et al.}[1]. It is operated as an inductive discharge and that has been recently characterized using optical emission spectroscopy (OES) by \textit{Stefanovic et al.}[2]. In this work the proposed plasma-jet is examined theoretically. A global model of the new device is presented based on the volume-integrated balances of particle number and electron density, and a series representation of the electromagnetic field in the resonator. An infinite number of modes can be found ordered by the azimuthal wave number m. The mode m=0 can be identified with the inductive mode and will be called H-mode, the mode m=1 is the capacitive mode and will be called E-mode. By equating the electromagnetic power that is absorbed by the plasma with the loss power, stable operating points and hysteresis effects can be investigated. In a second step the spatially resolved electromagnetic field strength will be considered. All results will be compared to the results of the OES measurements and imagines obtained from CCD-imaging.

[1]Porteanu et al.\textit{Plasma Sources Sci.Technol.}\textbf{22}, 035016 (2013)
[2] Stefanovic et al.\textit{Plasma Sources Sci.Technol.}\textbf{27}, 12LT01 (2018)
[3] Porteanu et al.\textit{Plasma Sources Sci.Technol.} accepted (2019)
PB  - IEEE
C3  - 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
T1  - Theoretical investigation of a novel microwave driven ICP plasma jet
UR  - https://hdl.handle.net/21.15107/rcub_dais_6959
ER  - 

@conference{
author = "Klute, Michael and Porteanu, Horia-Eugen and Stefanović, Ilija and Bibinov, Nikita and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter",
year = "2019",
abstract = "Theoretical investigation of a novel microwave driven ICP plasma jet
 26 Jun 2019, 16:15
 15m
 Gold Coast III/IV (Double Tree at the Entrance to Universal Orlando)
Oral  2.7 Microwave Plasma Interaction 2.7 Microwave Plasma Interaction III
Speaker
Mr Michael Klute (Ruhr University)
Description
Microwave and radio frequency driven plasmas-jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. This mode, however, couples considerable power to ions which limits the plasma density and the efficiency and gives rise to negative side effects such as erosion. The inductive coupling, known as H-mode, eliminates these disadvantages and is attractive for large scale plasmas. A novel small scale, microwave driven plasma-jet has been proposed by \textit{Porteanu et al.}[1]. It is operated as an inductive discharge and that has been recently characterized using optical emission spectroscopy (OES) by \textit{Stefanovic et al.}[2]. In this work the proposed plasma-jet is examined theoretically. A global model of the new device is presented based on the volume-integrated balances of particle number and electron density, and a series representation of the electromagnetic field in the resonator. An infinite number of modes can be found ordered by the azimuthal wave number m. The mode m=0 can be identified with the inductive mode and will be called H-mode, the mode m=1 is the capacitive mode and will be called E-mode. By equating the electromagnetic power that is absorbed by the plasma with the loss power, stable operating points and hysteresis effects can be investigated. In a second step the spatially resolved electromagnetic field strength will be considered. All results will be compared to the results of the OES measurements and imagines obtained from CCD-imaging.

[1]Porteanu et al.\textit{Plasma Sources Sci.Technol.}\textbf{22}, 035016 (2013)
[2] Stefanovic et al.\textit{Plasma Sources Sci.Technol.}\textbf{27}, 12LT01 (2018)
[3] Porteanu et al.\textit{Plasma Sources Sci.Technol.} accepted (2019)",
publisher = "IEEE",
journal = "2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida",
title = "Theoretical investigation of a novel microwave driven ICP plasma jet",
url = "https://hdl.handle.net/21.15107/rcub_dais_6959"
}

Klute, M., Porteanu, H., Stefanović, I., Bibinov, N., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2019). Theoretical investigation of a novel microwave driven ICP plasma jet. in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
IEEE..
https://hdl.handle.net/21.15107/rcub_dais_6959

Klute M, Porteanu H, Stefanović I, Bibinov N, Heinrich W, Awakowicz P, Brinkmann RP. Theoretical investigation of a novel microwave driven ICP plasma jet. in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida. 2019;.
https://hdl.handle.net/21.15107/rcub_dais_6959 .

Klute, Michael, Porteanu, Horia-Eugen, Stefanović, Ilija, Bibinov, Nikita, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Theoretical investigation of a novel microwave driven ICP plasma jet" in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida (2019),
https://hdl.handle.net/21.15107/rcub_dais_6959 .

TY  - CONF
AU  - Stefanović, Ilija
AU  - Klute, Michael
AU  - Brinkmann, Ralf Peter
AU  - Bibinov, Nikita
AU  - Heinrich, Wolfgang
AU  - Porteanu, Horia-Eugen
AU  - Awakowicz, Peter
PY  - 2019
UR  - https://indico.cern.ch/event/727938/contributions/3364035/
UR  - https://dais.sanu.ac.rs/123456789/6958
AB  - Miniature Microwave Inductively Coupled Plasma (MMWICP) source is a novel and versatile non-thermal plasma source, which profit of high electron density and high power efficiency. In its compact version a single MMWICP source comprises a quartz tube of 5 mm inner diameter enclosed by a copper resonator of 8 mm thickness. This basic unit can be combined in an array of two (double), four (Quadriga) or more sources. Here, the single source is characterized by Optical Emission Spectroscopy (OES). A continuous stream of nitrogen gas is running through the glass cylinder at a pressure of 2000 Pa. This specific pressure is chosen to satisfy the Local Field Approximation (LFA), which is used in the latter data analysis. For the OES measurements nitrogen as a test gas is selected for its well-known population kinetics. In particularly, the second positive system of neutral nitrogen (380 nm line) and first positive system of nitrogen molecular ion (391 nm) are monitored, for which the population kinetics can be described by a simple collision radiative model. The OES measuring unit consists of a macro objective, CCD camera and two narrow band-pass filters, which isolate the corresponding emission lines. With previously absolutely calibrated OES unit, the radially resolved absolute line intensities are collected with a 28 micrometer resolution. Simultaneously, an absolutely calibrated high resolution Echelle spectrometer monitors the rotational lines distribution form respective emissions. Using the rate equations of collision-radiative model and BOLSIG+ for solving a Boltzmann equation under the assumption of LFA, it is possible to measure the spatially resolved electron density and electric field. Moreover, the spatially resolved deposited power density is calculated. In the presentation we will discussed the power dissipation in CCP, ICP and hybrid mode of operation. In respect to power efficiency MMWICP will be compared to other microwave plasma sources.
PB  - IEEE
C3  - 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
T1  - Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source
UR  - https://hdl.handle.net/21.15107/rcub_dais_6958
ER  - 

@conference{
author = "Stefanović, Ilija and Klute, Michael and Brinkmann, Ralf Peter and Bibinov, Nikita and Heinrich, Wolfgang and Porteanu, Horia-Eugen and Awakowicz, Peter",
year = "2019",
abstract = "Miniature Microwave Inductively Coupled Plasma (MMWICP) source is a novel and versatile non-thermal plasma source, which profit of high electron density and high power efficiency. In its compact version a single MMWICP source comprises a quartz tube of 5 mm inner diameter enclosed by a copper resonator of 8 mm thickness. This basic unit can be combined in an array of two (double), four (Quadriga) or more sources. Here, the single source is characterized by Optical Emission Spectroscopy (OES). A continuous stream of nitrogen gas is running through the glass cylinder at a pressure of 2000 Pa. This specific pressure is chosen to satisfy the Local Field Approximation (LFA), which is used in the latter data analysis. For the OES measurements nitrogen as a test gas is selected for its well-known population kinetics. In particularly, the second positive system of neutral nitrogen (380 nm line) and first positive system of nitrogen molecular ion (391 nm) are monitored, for which the population kinetics can be described by a simple collision radiative model. The OES measuring unit consists of a macro objective, CCD camera and two narrow band-pass filters, which isolate the corresponding emission lines. With previously absolutely calibrated OES unit, the radially resolved absolute line intensities are collected with a 28 micrometer resolution. Simultaneously, an absolutely calibrated high resolution Echelle spectrometer monitors the rotational lines distribution form respective emissions. Using the rate equations of collision-radiative model and BOLSIG+ for solving a Boltzmann equation under the assumption of LFA, it is possible to measure the spatially resolved electron density and electric field. Moreover, the spatially resolved deposited power density is calculated. In the presentation we will discussed the power dissipation in CCP, ICP and hybrid mode of operation. In respect to power efficiency MMWICP will be compared to other microwave plasma sources.",
publisher = "IEEE",
journal = "2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida",
title = "Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source",
url = "https://hdl.handle.net/21.15107/rcub_dais_6958"
}

Stefanović, I., Klute, M., Brinkmann, R. P., Bibinov, N., Heinrich, W., Porteanu, H.,& Awakowicz, P.. (2019). Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source. in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida
IEEE..
https://hdl.handle.net/21.15107/rcub_dais_6958

Stefanović I, Klute M, Brinkmann RP, Bibinov N, Heinrich W, Porteanu H, Awakowicz P. Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source. in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida. 2019;.
https://hdl.handle.net/21.15107/rcub_dais_6958 .

Stefanović, Ilija, Klute, Michael, Brinkmann, Ralf Peter, Bibinov, Nikita, Heinrich, Wolfgang, Porteanu, Horia-Eugen, Awakowicz, Peter, "Power Consumption in a Miniature Microwave Inductively Coupled Plasma Source" in 2019 IEEE International Conference on Plasma Sciences (ICOPS), 22-28 June 2019, Orlando, Florida (2019),
https://hdl.handle.net/21.15107/rcub_dais_6958 .

TY  - CONF
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf Peter
AU  - Awakowicz, Peter
PY  - 2019
UR  - https://dais.sanu.ac.rs/123456789/6996
AB  - Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.
PB  - Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava
PB  - Bratislava : ociety for Plasma Research and Applications
C3  - Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019
T1  - New and versatile minature microwave plasma source
UR  - https://hdl.handle.net/21.15107/rcub_dais_6996
ER  - 

@conference{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf Peter and Awakowicz, Peter",
year = "2019",
abstract = "Miniature Microwave Inductively Coupled Plasma (MMWICP) source is characterized by means of Optical Emission Spectroscopy (OES) in nitrogen gas flow, which gives the information on basic plasma properties. Depending on the incident power the discharge runs in E-mode or in more efficient H-mode. The high resolution radial images of the source reveal different morphologies of different discharge modes. The measurements show an unexpected limitation in dissipated power, accompanied by spontaneous transition from H- to E-mode. The efficiency of the source is high: about 67% of incident power (P0) is deposited in the discharge, which is estimated from OES.",
publisher = "Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Bratislava : ociety for Plasma Research and Applications",
journal = "Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019",
title = "New and versatile minature microwave plasma source",
url = "https://hdl.handle.net/21.15107/rcub_dais_6996"
}

Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R. P.,& Awakowicz, P.. (2019). New and versatile minature microwave plasma source. in Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019
Bratislava : Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava..
https://hdl.handle.net/21.15107/rcub_dais_6996

Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann RP, Awakowicz P. New and versatile minature microwave plasma source. in Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019. 2019;.
https://hdl.handle.net/21.15107/rcub_dais_6996 .

Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf Peter, Awakowicz, Peter, "New and versatile minature microwave plasma source" in Book of Contributed Papers: 22nd Symposium on Application of Plasma Processes and 11th EU-Japan Joint Symposium on Plasma Processing, Štrbské Pleso, Slovakia, 18-24 January 2019 (2019),
https://hdl.handle.net/21.15107/rcub_dais_6996 .

TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
UR  - http://iopscience.iop.org/10.1088/1361-6595/aaefcc
UR  - https://dais.sanu.ac.rs/123456789/4640
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4640
ER  - 

@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4640"
}

Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P.. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4640

Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4640 .

Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf-Peter, Awakowicz, Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" in Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .,
https://hdl.handle.net/21.15107/rcub_dais_4640 .

TY  - JOUR
AU  - Stefanović, Ilija
AU  - Bibinov, Nikita
AU  - Porteanu, Horia-Eugen
AU  - Klute, Michael
AU  - Brinkmann, Ralf-Peter
AU  - Awakowicz, Peter
PY  - 2018
UR  - http://iopscience.iop.org/10.1088/1361-6595/aaefcc
UR  - https://dais.sanu.ac.rs/123456789/4827
AB  - Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
PB  - IOP Publishing
T2  - Plasma Sources Science and Technology
T1  - Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
SP  - 12LT01
VL  - 27
IS  - 12
DO  - 10.1088/1361-6595/aaefcc
UR  - https://hdl.handle.net/21.15107/rcub_dais_4827
ER  - 

@article{
author = "Stefanović, Ilija and Bibinov, Nikita and Porteanu, Horia-Eugen and Klute, Michael and Brinkmann, Ralf-Peter and Awakowicz, Peter",
year = "2018",
abstract = "Abstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.",
publisher = "IOP Publishing",
journal = "Plasma Sources Science and Technology",
title = "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow",
pages = "12LT01",
volume = "27",
number = "12",
doi = "10.1088/1361-6595/aaefcc",
url = "https://hdl.handle.net/21.15107/rcub_dais_4827"
}

Stefanović, I., Bibinov, N., Porteanu, H., Klute, M., Brinkmann, R.,& Awakowicz, P.. (2018). Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology
IOP Publishing., 27(12), 12LT01.
https://doi.org/10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4827

Stefanović I, Bibinov N, Porteanu H, Klute M, Brinkmann R, Awakowicz P. Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow. in Plasma Sources Science and Technology. 2018;27(12):12LT01.
doi:10.1088/1361-6595/aaefcc
https://hdl.handle.net/21.15107/rcub_dais_4827 .

Stefanović, Ilija, Bibinov, Nikita, Porteanu, Horia-Eugen, Klute, Michael, Brinkmann, Ralf-Peter, Awakowicz, Peter, "Optical characterization of a novel miniature microwave ICP plasma source in nitrogen flow" in Plasma Sources Science and Technology, 27, no. 12 (2018):12LT01,
https://doi.org/10.1088/1361-6595/aaefcc .,
https://hdl.handle.net/21.15107/rcub_dais_4827 .