Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
Аутори
Klute, MichaelKemaneci, Efe
Porteanu, Horia-Eugen
Stefanović, Ilija
Heinrich, Wolfgang
Awakowicz, Peter
Brinkmann, Ralf Peter
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with ...an capacitive and inductive component.
Кључне речи:
MMWICP / miniature microwave ICP / nitrogen plasmaИзвор:
Plasma Sources Science and Technology, 2021, 30, 6, 065014-Издавач:
- IOP Publishing
Финансирање / пројекти:
- Deutsche Forschungsgemeinschaft, SFB 1316
- http://dx.doi.org/10.13039/501100001659
DOI: 10.1088/1361-6595/ac04bc
ISSN: 0963-0252; 1361-6595
WoS: 000665028900001
Scopus: 2-s2.0-85109103726
Институција/група
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - JOUR AU - Klute, Michael AU - Kemaneci, Efe AU - Porteanu, Horia-Eugen AU - Stefanović, Ilija AU - Heinrich, Wolfgang AU - Awakowicz, Peter AU - Brinkmann, Ralf Peter PY - 2021 UR - https://dais.sanu.ac.rs/123456789/11799 AB - The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component. PB - IOP Publishing T2 - Plasma Sources Science and Technology T1 - Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements SP - 065014 VL - 30 IS - 6 DO - 10.1088/1361-6595/ac04bc UR - https://hdl.handle.net/21.15107/rcub_dais_11799 ER -
@article{ author = "Klute, Michael and Kemaneci, Efe and Porteanu, Horia-Eugen and Stefanović, Ilija and Heinrich, Wolfgang and Awakowicz, Peter and Brinkmann, Ralf Peter", year = "2021", abstract = "The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.", publisher = "IOP Publishing", journal = "Plasma Sources Science and Technology", title = "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements", pages = "065014", volume = "30", number = "6", doi = "10.1088/1361-6595/ac04bc", url = "https://hdl.handle.net/21.15107/rcub_dais_11799" }
Klute, M., Kemaneci, E., Porteanu, H., Stefanović, I., Heinrich, W., Awakowicz, P.,& Brinkmann, R. P.. (2021). Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology IOP Publishing., 30(6), 065014. https://doi.org/10.1088/1361-6595/ac04bc https://hdl.handle.net/21.15107/rcub_dais_11799
Klute M, Kemaneci E, Porteanu H, Stefanović I, Heinrich W, Awakowicz P, Brinkmann RP. Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements. in Plasma Sources Science and Technology. 2021;30(6):065014. doi:10.1088/1361-6595/ac04bc https://hdl.handle.net/21.15107/rcub_dais_11799 .
Klute, Michael, Kemaneci, Efe, Porteanu, Horia-Eugen, Stefanović, Ilija, Heinrich, Wolfgang, Awakowicz, Peter, Brinkmann, Ralf Peter, "Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements" in Plasma Sources Science and Technology, 30, no. 6 (2021):065014, https://doi.org/10.1088/1361-6595/ac04bc ., https://hdl.handle.net/21.15107/rcub_dais_11799 .