Analyses of the surface parameters in polycrystalline diamonds
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.
Ključne reči:
polycrystalline diamonds / microelectronic devices / MEMS / surface propertiesIzvor:
Serbian Journal of Electrical Engineering, 2020, 17, 1, 111-129Izdavač:
- Čačak : University of Kragujevac, Faculty of Technical Sciences
Finansiranje / projekti:
- Usmerena sinteza, struktura i svojstva multifunkcionalnih materijala (RS-MESTD-Basic Research (BR or ON)-172057)
Institucija/grupa
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - JOUR AU - Veljković, Sandra AU - Mitić, Vojislav V. AU - Paunović, Vesna AU - Lazović, Goran AU - Mohr, Marcus AU - Fecht, Hans PY - 2020 UR - https://dais.sanu.ac.rs/123456789/10046 AB - There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films. PB - Čačak : University of Kragujevac, Faculty of Technical Sciences T2 - Serbian Journal of Electrical Engineering T1 - Analyses of the surface parameters in polycrystalline diamonds SP - 111 EP - 129 VL - 17 IS - 1 DO - 10.2298/SJEE2001111V UR - https://hdl.handle.net/21.15107/rcub_dais_10046 ER -
@article{ author = "Veljković, Sandra and Mitić, Vojislav V. and Paunović, Vesna and Lazović, Goran and Mohr, Marcus and Fecht, Hans", year = "2020", abstract = "There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.", publisher = "Čačak : University of Kragujevac, Faculty of Technical Sciences", journal = "Serbian Journal of Electrical Engineering", title = "Analyses of the surface parameters in polycrystalline diamonds", pages = "111-129", volume = "17", number = "1", doi = "10.2298/SJEE2001111V", url = "https://hdl.handle.net/21.15107/rcub_dais_10046" }
Veljković, S., Mitić, V. V., Paunović, V., Lazović, G., Mohr, M.,& Fecht, H.. (2020). Analyses of the surface parameters in polycrystalline diamonds. in Serbian Journal of Electrical Engineering Čačak : University of Kragujevac, Faculty of Technical Sciences., 17(1), 111-129. https://doi.org/10.2298/SJEE2001111V https://hdl.handle.net/21.15107/rcub_dais_10046
Veljković S, Mitić VV, Paunović V, Lazović G, Mohr M, Fecht H. Analyses of the surface parameters in polycrystalline diamonds. in Serbian Journal of Electrical Engineering. 2020;17(1):111-129. doi:10.2298/SJEE2001111V https://hdl.handle.net/21.15107/rcub_dais_10046 .
Veljković, Sandra, Mitić, Vojislav V., Paunović, Vesna, Lazović, Goran, Mohr, Marcus, Fecht, Hans, "Analyses of the surface parameters in polycrystalline diamonds" in Serbian Journal of Electrical Engineering, 17, no. 1 (2020):111-129, https://doi.org/10.2298/SJEE2001111V ., https://hdl.handle.net/21.15107/rcub_dais_10046 .