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dc.creatorStefanović, Ilija
dc.creatorBibinov, Nikita
dc.creatorPorteanu, Horia-Eugen
dc.creatorKlute, Michael
dc.creatorBrinkmann, Ralf-Peter
dc.creatorAwakowicz, Peter
dc.date.accessioned2019-01-27T22:20:01Z
dc.date.available2019-01-27T22:20:01Z
dc.date.issued2018
dc.identifier.issn1361-6595
dc.identifier.urihttp://iopscience.iop.org/10.1088/1361-6595/aaefcc
dc.identifier.urihttp://dais.sanu.ac.rs/123456789/4827
dc.description.abstractAbstract A Miniature Microwave (MMW) Inductively Coupled Plasma Source (ICP) is characterized by optical emission spectroscopy and by optical imaging of nitrogen plasma. The MWW source operates in two different modes (H – mode and hybrid – E/H mode) with different plasma parameters and different emission morphologies, depending on the absorbed microwave (MW) power (Pabs). The measured spectra of the second positive system (N2(C-B)) and of the first negative system (N2+(B-X)) of nitrogen reveal an electron density ne = (6.4±1.7)×1018 m-3 and a gas temperature of Tg = (650±20)K for Pabs = 13 W at a pressure of 1000 Pa. By increasing the absorbed power to Pabs = 78 W the parameters increase to ne = (3.5±1.7)×1019 m-3 and Tg = (1600±100) K. The discharge morphology in hybrid and H - mode is different. While in the H -mode the plasma resembles a “donuts” shape, the hybrid mode has a very narrow shape close to the walls and to the gap capacitor of the resonator. For our discharge conditions the power absorption is limited to 158 W, above which the discharge spontaneously switches from H – mode to hybrid mode.
dc.languageen
dc.publisherIOP Publishing
dc.relationDFG, project No. 38909373
dc.rightsrestrictedAccess
dc.sourcePlasma Sources Science and Technology
dc.titleOptical characterization of a novel miniature microwave ICP plasma source in nitrogen flow
dc.typearticleen
dc.rights.licenseARR
dcterms.abstractСтефановић, Илија; Бибинов, Никита; Портеану, Хориа-Еуген; Клуте, Мицхаел; Бринкманн, Ралф-Петер; Awакоwицз, Петер;
dc.citation.spage12LT01
dc.citation.volume27
dc.citation.issue12
dc.identifier.wos000454246000001
dc.identifier.doi10.1088/1361-6595/aaefcc
dc.identifier.scopus2-s2.0-85060149167
dc.description.otherPeer-reviewed manuscript: [http://dais.sanu.ac.rs/handle/123456789/4640]
dc.type.versionpublishedVersion


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