Pulsed Laser Deposition of BaTiO3 on PVDF substrate
Апстракт
Piezoelectric materials play an important role in development of advanced Micro-electromechanical systems (MEMS) and Nano-electro-mechanical systems (NEMS). Their applications span the aero-space industry, communications, defense systems, national security, health care, information technology and environmental monitoring. Materials used in MEMS/NEMS mustsimultaneously satisfy numerous requirements for chemical, structural, mechanical and electrical properties. Although traditionally MEMS in particular have relied on silicon, the materials used in MEMS/NEMS are becoming more heterogeneous. Taking into account that materials nanostructuring can produce unique mechanical, electrical and piezoelectric properties, in this article the investigation of pulsed laser deposition of BaTiO3 on PVDF substrate has been performed. The titanium-saphire laser operated at 800 nm with 40-fs pulse duration and 1 kHz repetition rate was focused onto a mechanically activated BaTiO3 target. Deposition on PVD...F substrate was done at an oxygen partial pressure of 10-7 Torr using a laser pulse frequency of 1 kHz at room temperature. The crystal structure and the microstructure of the films were examined using an X-ray diffractometer and scanning electron microscope, while the surface morphology was observed by atomic force microscopy.It was found that pulsed laser deposition of BaTiO3 on PVDF substrate offers a new set of opportunities for development of advanced flexible piezo-films for the next generation of NEMS.
Кључне речи:
BaTiO3 / barium titanate / MEMS / NEMSИзвор:
Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : II Serbian Ceramic Society Conference, Sep 30th-Oct 1st, 2013, Belgrade, 2013, 48-49Издавач:
- Belgrade : Serbian Ceramic Society
Финансирање / пројекти:
- Усмерена синтеза, структура и својства мултифункционалних материјала (RS-MESTD-Basic Research (BR or ON)-172057)
Институција/група
Институт техничких наука САНУ / Institute of Technical Sciences of SASATY - CONF AU - Pavlović, Vera P. AU - Wu, M. AU - Đoković, Vladimir AU - Dukić, M. AU - Pavlović, Vladimir B. PY - 2013 UR - https://dais.sanu.ac.rs/123456789/429 AB - Piezoelectric materials play an important role in development of advanced Micro-electromechanical systems (MEMS) and Nano-electro-mechanical systems (NEMS). Their applications span the aero-space industry, communications, defense systems, national security, health care, information technology and environmental monitoring. Materials used in MEMS/NEMS mustsimultaneously satisfy numerous requirements for chemical, structural, mechanical and electrical properties. Although traditionally MEMS in particular have relied on silicon, the materials used in MEMS/NEMS are becoming more heterogeneous. Taking into account that materials nanostructuring can produce unique mechanical, electrical and piezoelectric properties, in this article the investigation of pulsed laser deposition of BaTiO3 on PVDF substrate has been performed. The titanium-saphire laser operated at 800 nm with 40-fs pulse duration and 1 kHz repetition rate was focused onto a mechanically activated BaTiO3 target. Deposition on PVDF substrate was done at an oxygen partial pressure of 10-7 Torr using a laser pulse frequency of 1 kHz at room temperature. The crystal structure and the microstructure of the films were examined using an X-ray diffractometer and scanning electron microscope, while the surface morphology was observed by atomic force microscopy.It was found that pulsed laser deposition of BaTiO3 on PVDF substrate offers a new set of opportunities for development of advanced flexible piezo-films for the next generation of NEMS. PB - Belgrade : Serbian Ceramic Society C3 - Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : II Serbian Ceramic Society Conference, Sep 30th-Oct 1st, 2013, Belgrade T1 - Pulsed Laser Deposition of BaTiO3 on PVDF substrate SP - 48 EP - 49 UR - https://hdl.handle.net/21.15107/rcub_dais_429 ER -
@conference{ author = "Pavlović, Vera P. and Wu, M. and Đoković, Vladimir and Dukić, M. and Pavlović, Vladimir B.", year = "2013", abstract = "Piezoelectric materials play an important role in development of advanced Micro-electromechanical systems (MEMS) and Nano-electro-mechanical systems (NEMS). Their applications span the aero-space industry, communications, defense systems, national security, health care, information technology and environmental monitoring. Materials used in MEMS/NEMS mustsimultaneously satisfy numerous requirements for chemical, structural, mechanical and electrical properties. Although traditionally MEMS in particular have relied on silicon, the materials used in MEMS/NEMS are becoming more heterogeneous. Taking into account that materials nanostructuring can produce unique mechanical, electrical and piezoelectric properties, in this article the investigation of pulsed laser deposition of BaTiO3 on PVDF substrate has been performed. The titanium-saphire laser operated at 800 nm with 40-fs pulse duration and 1 kHz repetition rate was focused onto a mechanically activated BaTiO3 target. Deposition on PVDF substrate was done at an oxygen partial pressure of 10-7 Torr using a laser pulse frequency of 1 kHz at room temperature. The crystal structure and the microstructure of the films were examined using an X-ray diffractometer and scanning electron microscope, while the surface morphology was observed by atomic force microscopy.It was found that pulsed laser deposition of BaTiO3 on PVDF substrate offers a new set of opportunities for development of advanced flexible piezo-films for the next generation of NEMS.", publisher = "Belgrade : Serbian Ceramic Society", journal = "Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : II Serbian Ceramic Society Conference, Sep 30th-Oct 1st, 2013, Belgrade", title = "Pulsed Laser Deposition of BaTiO3 on PVDF substrate", pages = "48-49", url = "https://hdl.handle.net/21.15107/rcub_dais_429" }
Pavlović, V. P., Wu, M., Đoković, V., Dukić, M.,& Pavlović, V. B.. (2013). Pulsed Laser Deposition of BaTiO3 on PVDF substrate. in Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : II Serbian Ceramic Society Conference, Sep 30th-Oct 1st, 2013, Belgrade Belgrade : Serbian Ceramic Society., 48-49. https://hdl.handle.net/21.15107/rcub_dais_429
Pavlović VP, Wu M, Đoković V, Dukić M, Pavlović VB. Pulsed Laser Deposition of BaTiO3 on PVDF substrate. in Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : II Serbian Ceramic Society Conference, Sep 30th-Oct 1st, 2013, Belgrade. 2013;:48-49. https://hdl.handle.net/21.15107/rcub_dais_429 .
Pavlović, Vera P., Wu, M., Đoković, Vladimir, Dukić, M., Pavlović, Vladimir B., "Pulsed Laser Deposition of BaTiO3 on PVDF substrate" in Advanced Ceramics and Application : new frontiers in multifunctional material science and processing : program and the book of abstracts : II Serbian Ceramic Society Conference, Sep 30th-Oct 1st, 2013, Belgrade (2013):48-49, https://hdl.handle.net/21.15107/rcub_dais_429 .